Standard sample for verifying resolution of scanning transmission electron microscope as well as preparation method and verification method of standard sample
A transmission electron microscope and resolution technology, which is applied in the field of microscopy, can solve the problem of complicated and unintuitive resolution methods of spherical aberration correction scanning transmission electron microscope
Active Publication Date: 2021-04-23
YANGTZE MEMORY TECH CO LTD
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Problems solved by technology
[0003] However, existing methods for verifying the resolution of spherical aberration-corrected STEM are complex and non-intuitive
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[0072]The embodiment of the present invention also provides a method of verifying the standard of the scanning transmission electron microscope resolution, specifically seeFigure 4 . As shown, the method comprises the following steps:
[0073]Step 401, a silicon substrate having a surface is (100) crystal plane, the surface of the silicon substrate has a target region;
[0074]In step 402, the silicon substrate is cut around the target area to obtain a sample containing the target area;
[0075]Step 403, processes the target area of the sample, exposing the surface to be scanned, to obtain a sample containing the descending surface;
[0076]Wherein the scanning surface is the crystal plane in the {112}
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The embodiment of the invention discloses a standard sample for verifying the resolution of a scanning transmission electron microscope and a preparation method of the standard sample, and the method comprises the following steps: providing a silicon substrate with a (100) crystal face on the surface, wherein the surface of the silicon substrate is provided with a target area; cutting the silicon substrate around the target area to obtain a sample containing the target area; processing the target area of the sample to expose a to-be-scanned surface so as to obtain a standard sample containing the to-be-scanned surface; wherein the to-be-scanned surface is a crystal face in a {112} crystal face family.
Description
Technical field[0001]The present invention relates to the field of microscopy, and in particular, to a sample of the scanning transmissive electron microscope resolution and the preparation method thereof, verification method.Background technique[0002]Spherical correction scanning adapter electron microscope (Cs Corrected STEMs becomes a cutlery to study nanomaterials with its ultra-high resolution.[0003]However, existing methods for verifying the spherical correlation scanning the resolution of the electron microscopy are complex and not intuitive.Inventive content[0004]In view of this, the embodiment of the present invention provides a standard and preparation method thereof for the purpose of solving at least one problem present in the background art.[0005]In order to achieve the above object, the technical solution of the present invention is achieved:[0006]Embodiments of the present invention provide a method of verifying a sample of the scanning transmissive electron micromirr...
Claims
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IPC IPC(8): G01N23/2202G01N23/2251
CPCG01N23/2202G01N23/2251
Inventor 吴诗嫣刘军
Owner YANGTZE MEMORY TECH CO LTD