A fiber grating pressure sensor with a diaphragm-type cascade structure and a manufacturing method thereof
A pressure sensor and fiber grating technology, which is applied in the direction of fluid pressure measurement, measurement of fluid pressure, instruments, etc. using optical methods, can solve the problems of large volume, high cost, unfavorable for single-point disposable measurement, etc., and achieve high precision. , the effect of eliminating the effect of temperature
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Embodiment 1
[0038] like figure 1 As shown, a diaphragm-type two-stage cascade structure fiber grating pressure sensor includes two pressure sensors connected through a sleeve, and a water-permeable hole 18 is provided on the side wall of the sleeve.
[0039] The first-stage pressure sensor includes a first-stage pressure shell 1 and a first-stage pressure diaphragm 2 located at the bottom of the first-stage pressure shell 1. The first-stage pressure diaphragm 2 is welded with a fixed pier 3, and the upper end of the fixed pier 3 is provided with a micro-diaphragm. The micro-hole is filled with colloid, and one end of the optical fiber is inserted into the micro-hole of the fixing pier 3 to be fixed.
[0040] The second-stage pressure sensor includes a second-stage pressure casing 4 and a second-stage pressure diaphragm 5 located at the bottom of the second-stage pressure casing 4. The second-stage pressure diaphragm 5 is provided with a central hole 21, and the central hole 21 is sealed a...
Embodiment 2
[0053] like Image 6 As shown, a diaphragm-type three-stage cascade structure fiber grating pressure sensor includes three pressure sensors connected through a sleeve, and a water-permeable hole 18 is provided on the side wall of the sleeve.
[0054] The first-stage pressure sensor includes a first-stage pressure shell 1 and a first-stage pressure diaphragm 2 located at the bottom of the first-stage pressure shell 1. The first-stage pressure diaphragm 2 is welded with a fixed pier 3, and the upper end of the fixed pier 3 is provided with a micro-diaphragm. The micro-hole is filled with colloid, and one end of the optical fiber is inserted into the micro-hole of the fixing pier 3 to be fixed.
[0055] The second-stage pressure sensor includes a second-stage pressure casing 4 and a second-stage pressure diaphragm 5 located at the bottom of the second-stage pressure casing 4. The second-stage pressure diaphragm 5 is provided with a central hole 21, and the central hole 21 is seal...
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