Method and device for simultaneously measuring reflection and transmission distortion difference of optical element

Abstract

The invention relates to a method and device for simultaneously measuring the reflection and transmission distortion difference of an optical element. The method comprises the steps: enabling a detection light source to enter a first half-transparent and half-reflecting mirror which is parallel to a to-be-measured sample, enabling transmission light transmitted by the first half-transparent and half-reflecting mirror to serve as detection light, enabling the detection light to enter the to-be-measured sample, and dividing the detection light into reflected light and transmission light, wherein light paths corresponding to the reflected light and the transmitted light are respectively called as a reflecting arm and a transmitting arm, and a light beam on the transmitting arm passes through a first optical path difference adjusting mechanism and a first reflecting mirror and then enters a second semi-transparent semi-reflecting mirror; the light beam reflected by the third semi-transparent semi-reflective mirror enters the second semi-transparent semi-reflective mirror and interferes with the light beam entering the transmission arm of the second semi-transparent semi-reflective mirror, and the light beam is acquired by the first camera and imaged into interference fringes. According to the invention, the deformation of the front surface and the rear surface of the highlight optical element can be quantitatively and reversely deduced on line in real time, the result is accurate, and the optical path difference between transmitted light and reflected light can be measured through a single camera.

Description

technical field [0001] The invention relates to the technical field of optical measurement, in particular to a method and a device for simultaneously measuring reflection and transmission distortion of optical elements. Background technique [0002] In a high-energy laser system, the surface of the optical element will be deformed due to thermal stress or other forms of stress, resulting in distortion of the laser wavefront. For the same optical element, the wavefront distortion of the reflected light and transmitted light due to its surface deformation is quite different, and even the sign of the distortion is opposite. This difference is called the transmission / reflection wavefront distortion difference of the optical element. According to the different optical element materials, processes, crystal orientations, clamping methods and incident light parameters, the difference in transmitted / reflected wavefront distortion will show different characteristics and evolution tren...

AI Technical Summary

Problems solved by technology

There are two main problems in this measurement method. One is that more optical components will be introduced into the strong light emission path, which will increase the complexity of the system and increase the system error; the other is that the difference between two different Hartmann sensors The difference in calibration will introduce additional error, resulting in inaccurate measurement results

For similar reasons, measuring reflected and transmitted wavefront distortion separately at different time intervals with a single Hartmann sensor also affects the accuracy of the measurement

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