A method and device for simultaneously measuring reflection and transmission distortion of optical elements

Abstract

A method and device for simultaneously measuring reflection and transmission distortion of an optical element. The detection light source is incident on the first half-mirror, and the first half-mirror is parallel to the sample to be measured, and is transmitted through the first half-mirror. The transmitted light is used as the detection light. The detection light is incident on the sample to be tested, and is divided into reflected light and transmitted light after passing through the sample to be tested. The corresponding optical paths of the reflected light and the transmitted light are called the reflection arm and the transmission arm respectively. The light beam on the reflection arm is incident on the second half-mirror after passing through the first optical path difference adjustment mechanism and the first reflector; The reflection mirror interferes with the light beam incident on the transmission arm of the second half mirror, and is captured and imaged by the first camera as interference fringes. The invention can reverse the deformation of the front and rear surfaces of the strong light optical element quantitatively in real time and on-line with accurate results, and can use a single camera to measure the optical path difference between the transmitted light and the reflected light.

Description

Technical field [0001] The present invention relates to the field of optical measurement, and more particularly to a method and apparatus for simultaneously measuring the difference in reflective transmission distortion of the optical element. Background technique [0002] In high-energy laser systems, the surface of the optical element occurs due to the action of thermal stress or other form stress, resulting in a distortion before laser wave. For the same optical element, the wavefront distortion difference caused by its surface deformation due to its surface deformation, even the distortion symbol, said that this difference is the transmission / reflection wavef distortion of the optical element. Depending on the optical element material, the process, crystal, clamping mode, the transmissive / reflected wavefront distortion will exhibit different characteristics and evolution trends. [0003] The transmissive / reflected wavefront distortion in the high energy laser system is ...

AI Technical Summary

Problems solved by technology

There are two main problems in this measurement method. One is that more optical components will be introduced into the strong light emission path, which will increase the complexity of the system and increase the system error; the other is that the difference between two different Hartmann sensors The difference in calibration will introduce additional error, resulting in inaccurate measurement results

For similar reasons, measuring reflected and transmitted wavefront distortion separately at different time intervals with a single Hartmann sensor also affects the accuracy of the measurement

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