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ACTUATOR and chip including the same

A technology of actuators and linear actuators, which is applied in the direction of instruments, scientific instruments, electric solid devices, etc., and can solve the problems of comb structure stuck and reduce the movement efficiency of comb structure

Pending Publication Date: 2021-05-11
SIMOTORS CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This off-axis movement can reduce the efficiency of the comb structure and even cause the moving comb structure to get stuck on the fixed comb structure

Method used

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  • ACTUATOR and chip including the same
  • ACTUATOR and chip including the same
  • ACTUATOR and chip including the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0030] 1. A linear actuator comprising: a substrate having a cavity; a first fixed electrode structure formed on the substrate; and a movable electrode structure connected to the substrate through an elastic component, wherein: the The first fixed electrode structure has a first plurality of fingers; and the movable electrode structure has a second plurality of fingers, through the first plurality of fingers and the second plurality of fingers, the first fixed The electrode structure and the movable electrode structure form a capacitor, and the first plurality of fingers and the second plurality of fingers are disposed above the cavity.

[0031] 2. The linear actuator of embodiment 1, wherein the substrate has an electronic component.

[0032] 3. The linear actuator according to embodiment 1 or 2, wherein the substrate has a front surface and a rear surface, and the cavity extends from the front surface to the rear surface.

[0033] 4. The linear actuator according to any one...

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Abstract

The present invention relates to an actuator and a chip including the same. The invention provides a linear actuator. The linear actuator includes: a substrate having a cavity; a first fixed electrode structure fixed on the substrate; an elastic suspending device; and a movable electrode structure connected to the substrate through the elastic suspending device, wherein: the cavity has a first area; at least one of the first fixed electrode structure and the movable electrode structure has a second projection area on the substrate; and the first area and the second projection area overlap. The linear actuator allows the making of an out-of-plane linear motion motor with a large motion stroke, the robustness of impact, the easy removal of residual process contaminants, an improvement of the efficiency of electrical-to-mechanical energy conversion and the off-axis motion decoupling of movable comb structure.

Description

[0001] 【CROSS-REFERENCE TO RELATED APPLICATIONS】 [0002] This application claims priority to U.S. Provisional Patent Application Serial No. 62 / 931,926, filed November 7, 2019, which is hereby incorporated by reference in its entirety. 【Technical field】 [0003] The present invention relates to a linear actuator, in particular to a microelectromechanical system (Microelectromechanical System, MEMS) linear actuator. 【Background technique】 [0004] MEMS actuators have many advantages, such as small size, low cost, precise motion control, and low power consumption, which make MEMS actuators suitable for applications in compact electronic devices or systems. To improve the mechanical energy conversion efficiency of MEMS actuators, very narrow structure pitches are usually used. Using very narrow structure pitches can lead to process residues that are difficult to remove. When the center of gravity of the load is not aligned with the center of gravity of the actuator, the load ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/04
CPCB81B2201/03B81B7/04H01L27/14609H01L27/14634G03B5/04G03B5/02H04N23/60H01L31/0203H01L31/02325H01L27/1443H01L27/14618H01L27/14683G02B26/001G02B5/284B81B3/0021B81B3/0062B81B2201/033B81B2203/0307B81B2203/053H01G5/16H01G5/18G01J3/26G01J2003/1221G01J3/06G01J2003/061G01J3/0202H04N23/54H01L31/186G01J1/44G01J1/0403G02B26/0833B81B3/0027B81B3/0054B81B2203/0136G01J3/2803G01J3/2823G01J5/12G01J2005/0077H02N1/008B81B2203/051G01J1/0488G01J1/42B81B3/0067B81B2201/034
Inventor 许郁文
Owner SIMOTORS CO