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A kind of quartz crucible and preparation method thereof

A technology of quartz crucible and crucible, which is applied in the field of quartz crucible and its preparation, which can solve the problems of complex operation, swelling and cracking of single crystal furnace, weak bonding force between coating and inner surface, etc., and achieve the effect of small dosage and low deformation rate of crucible

Active Publication Date: 2022-04-19
徐晓军
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The quartz crucible used in the molding process of compound single crystal crystallization generally requires its deformation rate to be extremely low. If the deformation rate of the quartz crucible is large during use, it will cause the single crystal furnace to swell and crack, and the whole furnace single crystal crystallization will fail. The yield of crystallization is reduced. Usually, the method to solve the anti-deformation ability of the quartz crucible is to improve the purity of the quartz crucible to increase the viscosity of the quartz crucible at high temperature to improve the anti-deformation ability of the quartz crucible. Existing reports use ultra-pure quartz sand in The surface of the quartz crucible is formed with transparent content or sprayed with a coating of quartz sand doped with alkaline earth metals to improve the performance of the crucible; however, the existing coating methods have the following problems: (1) The bonding force between the coating on the inner surface of the crucible and the inner surface is weak, and it is easy to fall off ; (2) The coating has the risk of secondary pollution of the quality of the crucible; (3) The coating processing process is long and the operation is complicated

Method used

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  • A kind of quartz crucible and preparation method thereof
  • A kind of quartz crucible and preparation method thereof
  • A kind of quartz crucible and preparation method thereof

Examples

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Effect test

Embodiment 1

[0029] A kind of quartz crucible, the preparation method of described quartz crucible comprises the steps:

[0030] (1) Dissolve 49g of aluminum chloride in 1000kg of water, add hydrofluoric acid and hydrochloric acid (volume ratio 1:1) to adjust the pH to 3, mix with 1000kg of high-purity quartz sand, and stir at 90°C for 18h;

[0031] (2) Rinse the product processed in step (1) with deionized water until the waste liquid is neutral after rinsing, and stop rinsing;

[0032] (3) the product after step (2) rinsing is mixed with 28g aluminum hydroxide;

[0033] (4) drying the mixture prepared in step (3) at 1050° C. to obtain pretreated high-purity quartz sand;

[0034] (5) Put the pretreated high-purity quartz sand into the rotating crucible mold, form a crucible shape under the action of centrifugal force, and then pass an electric current to the electrode above the crucible mold to form an arc at a high temperature above 2000 ° C, and slowly The pretreated high-purity quart...

Embodiment 2

[0036] A kind of quartz crucible, the preparation method of described quartz crucible comprises the steps:

[0037] (1) Dissolve 176g of aluminum chloride in 1000kg of water, add hydrofluoric acid and hydrochloric acid (volume ratio 1:1) to adjust the pH to 2, mix with 1000kg of high-purity quartz sand, and stir at 150°C for 12h;

[0038] (2) Rinse the product processed in step (1) with deionized water until the waste liquid is neutral after rinsing, and stop rinsing;

[0039] (3) the product after step (2) rinsing is mixed with 100g aluminum hydroxide;

[0040] (4) drying the mixture prepared in step (3) at 800° C. to obtain pretreated high-purity quartz sand;

[0041] (5) Put the pretreated high-purity quartz sand into the rotating crucible mold, form a crucible shape under the action of centrifugal force, and then pass an electric current to the electrode above the crucible mold to form an arc at a high temperature above 2000 ° C, and slowly The pretreated high-purity qua...

Embodiment 3

[0043] A kind of quartz crucible, the preparation method of described quartz crucible comprises the steps:

[0044] (1) Dissolve 294g of aluminum chloride in 1000kg of water, add hydrofluoric acid and hydrochloric acid (volume ratio 1:1) to adjust the pH to 1, mix with 1000kg of high-purity quartz sand, and stir at 120°C for 16h;

[0045] (2) Rinse the product processed in step (1) with deionized water until the waste liquid is neutral after rinsing, and stop rinsing;

[0046] (3) the product after step (2) rinsing is mixed with 168g aluminum hydroxide;

[0047] (4) drying the mixture prepared in step (3) at 1000° C. to obtain pretreated high-purity quartz sand;

[0048] (5) Put the pretreated high-purity quartz sand into the rotating crucible mould, form a crucible shape under the action of centrifugal force, and then pass an electric current to the electrode above the crucible mould, forming an arc at a high temperature above 2000 ° C, and slowly The pretreated high-purity...

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Abstract

The invention discloses a quartz crucible. The preparation method of the quartz crucible comprises the following steps: (1) dissolving metal oxide or metal salt in an aqueous solution, adding acid to adjust the pH to 1-3, and mixing it with high-purity quartz sand , stirred at 90-150°C for more than 12h; (2) Rinse the product treated in step (1) with deionized water until the waste liquid after rinsing is neutral, and stop rinsing; (3) Rinse after step (2) ) mixing the product after rinsing with the metal hydroxide corresponding to the metal described in step (1); (4) drying the mixture prepared in step (3) at 600-1050°C to obtain pretreated high-purity quartz sand; (5) forming the quartz crucible by forming the pretreated high-purity quartz sand obtained in step (4). The quartz crucible of the invention has a low deformation rate, a service life of more than 300 hours at 1500 DEG C, and has the characteristics of resistance to temperature impact and crystallization.

Description

technical field [0001] The invention relates to the technical field of chemical production, in particular to a quartz crucible and a preparation method thereof. Background technique [0002] Quartz crucible is an essential raw material for the production of monocrystalline silicon. Put the raw material polycrystalline silicon crystal block into the quartz crucible, heat and melt in the single crystal furnace, add crystal seeds into the molten silicon liquid, and then the silicon atoms in the molten silicon liquid flow along The seeds are arranged into regular crystals and become single crystals; [0003] The quartz crucible used in the molding process of compound single crystal crystallization generally requires its deformation rate to be extremely low. If the deformation rate of the quartz crucible is large during use, it will cause the single crystal furnace to swell and crack, and the whole furnace single crystal crystallization will fail. The yield of crystallization is...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B29/06C30B9/00C30B11/00C30B15/10C03B20/00C03C3/06
CPCC30B29/06C30B9/00C30B11/002C30B15/10C03B19/095C03C3/06
Inventor 徐晓军
Owner 徐晓军