Plasma machine uniformity test method
A test method and uniformity technology, applied in the field of Plasma machine uniformity test, which can solve the problem of inability to evaluate Plasma's products that can meet relevant requirements
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[0031] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0032] The invention provides a method for testing the uniformity of a Plasma machine, and the method for testing the uniformity of a Plasma machine specifically includes the following steps:
[0033] Step 1. Prepare several test pieces 10, bake the test pieces 10 at 135°C for 30 minutes, put them into a drying dish and cool them to room temperature, weigh and mark the cooled test pieces 10;
[0034] Step 2: Prepare three sets of copper-clad fixture boards 20 and several copper-clad dummy boards 30, respectively put the test piece 10 into the finished copper-clad fixture board 20, and fix the four corners of the test piece 10 with high-temperature adhesive tape. In this embodiment, 9 PCS test pieces 10 are mounted on each copper-clad fixture board ...
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