Lead screw supporting device for machining and detecting optical reflecting mirror
A technology of supporting device and mirror, applied in workpiece clamping device, grinding workpiece support, manufacturing tool, etc., can solve the problems of poor positioning performance, insufficient axial rigidity, complex structure of static pressure support device, etc.
Pending Publication Date: 2021-05-25
CHANGCHUN UNIV OF TECH
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Problems solved by technology
[0003] The invention provides a screw support device for processing and testing optical mirrors, the purpose of which is to solve the problems of existing static pressure support devices such as complex structure, insufficient axial rigidity, and poor positioning performance, and can support large-diameter reflectors The displacement of the screw is converted into the supporting force of the spring to correct the surface shape and control the attitude of the mirror body;
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[0012] Such as figure 1 As shown, the static pressure screw support device used in the processing state of the optical mirror includes a cylinder body 1, a rolling diaphragm 2, a cylinder head 3, a weight 4, a limit piece 5, a ball bearing 6, a screw plug 7, Screw rod 8, limit block 9, spring 10, reflector 11, described cylinder body 1 is installed on the processing base of reflector, the both sides of the edge area of rolling diaphragm 2 are connected with cylinder body 1 and cylinder cover 3 respectively Bolt connection, the two sides of the central area of the rolling diaphragm 2 are respectively bolted to the weight 4 and the limiter 5, and the limiter 5, the rolling diaphragm 2, and the weight 4 are respectively set one at the corresponding position from top to bottom. A threaded blind hole of φ5 and a vent hole of φ1, the screw plug 7 cooperates with the threaded blind hole on the limit piece 5, a φ10 blind hole is set at the center of the weight 4, which is used to ...
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The invention provides a lead screw supporting device for machining and detecting an optical reflecting mirror. The device comprises a cylinder body, a weight, a diaphragm, a limiting piece, a lead screw, a ball bearing, a cylinder cover and a reflecting mirror assembly, a through hole is formed in the side face of the cylinder body, and hydraulic oil liquid enters and exits the through hole; the limiting piece, the rolling diaphragm and the weight are connected through bolts, blind holes with the diameters of phi 10 and phi 6 are sequentially formed at the center of the weight from top to bottom, the ball bearing is placed in the blind hole with the diameter of phi 10 and matched with the lead screw, and a limiting block is arranged at the tail end of the lead screw and placed in the blind hole with the diameter of phi 6 of the weight; an internal thread matched with the middle position of the lead screw is arranged at the center position of the cylinder cover, and a boss is arranged inside to limit the limiting piece; and the reflecting mirror assembly comprises a reflecting mirror and a spring, and the spring is bonded in a reflecting mirror supporting hole. The device is better in sealing performance and has higher supporting axial rigidity, the lead screw can convert axial displacement into output force of the spring to actively correct the mirror surface in the detection state, and the optical machining supporting precision is improved.
Description
technical field [0001] The invention belongs to the technical field of static pressure support, and in particular relates to a screw rod support device for processing and detecting optical mirrors. Background technique [0002] The optical-mechanical structure is equivalent to the skeleton of the telescope system. Its function is to maintain the position and shape of each mirror and functional module to ensure that the system meets the requirements of diffraction-limited imaging accuracy. One of the core difficulties in the development of the telescope is to ensure that the primary mirror with the largest aperture Accuracy, in today's increasingly mature manufacturing technology and continuous improvement of detection level, the support stability of mirror processing has become a bottleneck restricting the improvement of optical processing accuracy and efficiency. Static pressure support is realized by controlling the support force in the static pressure cylinder during optic...
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IPC IPC(8): B24B41/06B25B11/00
CPCB24B41/06B25B11/00
Inventor 关英俊江昱含胡海飞董得义
Owner CHANGCHUN UNIV OF TECH