Object stage moving structure, object stage device and vacuum equipment

Abstract

The invention relates to an objective table moving structure, an objective table device and vacuum equipment. The objective table moving structure comprises a mechanical arm structure arranged in a vacuum cavity, wherein one end of the mechanical arm structure is installed on an installation base of a hermetical design; the installation base is arranged on a panel of the vacuum cavity and drives the mechanical arm structure to rotate through an external driving device; an objective table is arranged at the other end of the mechanical arm structure and controlled by the mechanical arm structure to move on the horizontal plane. According to the above technical scheme, the mechanical arm structure is adopted, so requirements for a standard component of the objective table moving structure is lowered, and use of complex accessories such as a lead screw and a guide rail is reduced; and since the mechanical arm structure is driven by the external driving device, the condition requirement of the driving device is lowered, and equipment cost is saved.

Description

technical field [0001] The present application relates to the technical field of vacuum equipment, in particular to a stage moving structure, a stage device and vacuum equipment. Background technique [0002] In vacuum equipment such as vacuum etching and vacuum coating, the technology is mainly realized by using vacuum chamber and ion source. Taking vacuum etching as an example, physical etching is adopted, and the ion beam accelerated by the electric field in the ion source is used to The material placed on the stage is etched. During the etching process, the ion source is fixed. Since the ion beam emitted from the ion source has different strengths at different positions on the horizontal plane, in order to achieve the For the purpose of uniform etching, it is often necessary to move the etched object at a constant speed on the horizontal plane. [0003] In order to move the object to be etched at a constant speed on the horizontal plane, such as figure 1 As shown, the ...

AI Technical Summary

Problems solved by technology

However, due to working in a vacuum chamber environment, the structure of the XY motion platform not only has high requirements on the motor, but also has high requirements on the screw and guide rail. Oil-free materials must be used, so the overall cost will be relatively high.

[0004] It can be seen that due to the need to use vacuum motors and related oil-free materials, the equipment cost of the stage is relatively high, and it is not conducive to equipment maintenance

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