Multiplexer based on high-frequency acoustic resonator

Abstract

The invention provides a multiplexer based on a high-frequency acoustic wave resonator. The multiplexer comprises a multiplexer body, and the multiplexer is composed of the high-frequency acoustic wave resonator; the high-frequency acoustic wave resonator comprises a resonator substrate, a resonator bottom electrode, a resonator piezoelectric material, a resonator top electrode, a power connection radio frequency signal, a grounding signal, a standing wave partition area and an air cavity; an air cavity is arranged between the resonator substrate and the resonator piezoelectric material, a standing wave partition area is arranged on the resonator piezoelectric material, the grounding signal is connected with the resonator bottom electrode, and the power connection radio frequency signal is connected with the resonator top electrode; the multiplexer comprises a transmitting end and a receiving end, and the transmitting end and the receiving end are band-pass filters formed by acoustic resonators according to a trapezoidal topological structure. The multiplexer based on the high-frequency acoustic resonator provided by the invention solves the problem that a conventional bulk acoustic resonator is difficult to reach a relatively high resonant frequency.

Description

technical field [0001] The present invention relates to the technical field of high-frequency acoustic wave resonators, in particular to a multiplexer based on high-frequency acoustic wave resonators. Background technique [0002] With the rapid development of 5G communication technology, conventional duplexers or multiplexers have been difficult to meet the application requirements. For this reason, a Chinese invention patent based on thin film bulk acoustic resonator technology is disclosed in the publication number CN111525909A A duplexer composed of filters, including a substrate for mounting components; a first filter T2, a second filter T4, a first IPD packaging device T1 and a second IPD packaging device T3 installed on the substrate; the first The filter T2 is connected to the second port TX through the transmission line equivalent circuit T02 between the second port, the second filter T4 is connected to the third port RX through the transmission line equivalent circ...

AI Technical Summary

Problems solved by technology

[0002] With the rapid development of 5G communication technology, conventional duplexers or multiplexers have been difficult to meet the application requirements. For this reason, a Chinese invention patent based on thin film bulk acoustic resonator technology is disclosed in the publication number CN111525909A A duplexer composed of filters, including a substrate for mounting components; a first filter T2, a second filter T4, a first IPD packaging device T1 and a second IPD packaging device T3 installed on the substrate; the first The filter T2 is connected to the second port TX through the transmission line equivalent circuit T02 between the second port, the second filter T4 is connected to the third port RX through the transmission line equivalent circuit T03 between the third port, and the first The IPD packaging device T1 and the second IPD packaging device T3 are connected to the antenna port ANT through the transmission line equivalent circuit T01 between the first port, and the first IPD packaging device T1 and the second IPD packaging device T3 are composed of lumped parameter devices The filter is used to adjust the phase of the signal passing through the first filter and the second filter to prevent the signals from interfering with each other

[0003] In view of the above-mentioned related technologies, the inventor believes that there is a problem that the operating frequency of the multiplexer based on the conventional thin-film bulk acoustic resonator is often limited by the bulk acoustic resonator used and is difficult to improve. Therefore, it is necessary to propose a Technical solution to improve the above technical problems

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