X-ray inspection apparatus and x-ray inspection method

A technology for inspection devices and inspection methods, applied to measuring devices, material analysis using radiation diffraction, nuclear radiation exploration, etc., can solve problems such as difficult X-ray foreign matter inspection, inability to correct correctly, difficult calibration, etc., and achieve high The effect of detection accuracy, continuous and efficient inspection
CN112925034APending Publication Date: 2021-06-08HITACHI HIGH TECH SCI CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
HITACHI HIGH TECH SCI CORP
Publication Date
2021-06-08

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Abstract

Provided are an X-ray inspection apparatus and an X-ray inspection method capable of continuously inspecting even a long sheet-shaped sample while performing intensity correction. The X-ray inspection apparatus includes an X-ray source; a sample moving mechanism; an X-ray detector equipped with a line sensor with pixels detecting X-ray radiation passing through a sample; an image storage unit for storing X-ray radiation intensities; an intensity correction unit for correcting the X-ray radiation intensities stored in the image storage unit; and a defect detector for detecting a defect in the sample. The intensity correction unit sets an intensity of X-rays detected from the inspection initiation region after starting inspection of the sample or an intensity of X-rays preliminarily detected from the sample before starting the inspection as a reference radiation intensity, and corrects an intensity of X-rays detected from the subsequent inspection region based on a correction coefficient obtained from comparison between the intensity of X-rays detected from the subsequent inspection region and the reference radiation intensity.
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Description

technical field

[0001] The present invention relates to an X-ray inspection device and an X-ray inspection method capable of detecting foreign matter and the like in a sample. Background technique

[0002] Generally, X-ray transmission inspection is used in order to detect tiny foreign matter such as metal in a sheet-like long sample (inspection object). The sample is transported between the radiation detectors, and the presence or absence of foreign matter is determined from the X-ray transmission image obtained by irradiating the sample with X-rays.

[0003] In an X-ray inspection apparatus used in such an X-ray transmission inspection, since inspection operations are continuously performed, temporal stability is required in terms of the inspection capability of the apparatus. However, in general, the X-ray intensity of the X-ray source and the sensitivity of the X-ray detector fluctuate with time. In addition, elements of the X-ray detector degrade in detection intensit...

Claims

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