Thickness measuring device of anti-reflection film and method for monitoring growth of anti-reflection film in situ
A technology of thickness measurement and anti-reflection film, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problem of inaccurate anti-reflection film thickness, etc., and achieve the effect of easy operation, accuracy assurance and accurate testing
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Embodiment 1
[0051] This embodiment provides a specific embodiment of a thickness measuring device for reducing the membrane, such as figure 1 As shown, the solar cell 7 is placed in a cavity in the sample stage 3, and a laser emitter 2 is attached to the sample stage 3. The solar cell 7 is connected to the current tester 4, and the laser emitter 2 is irradiated in the solar cell 7. On the surface of the surface, the current generates a current, and the current generated by the solar cell 7 is detected using the current tester 4. When the thickness of the reducing film is different, the current generated by the laser irradiation will vary. The size of the detection current is then determined to determine the thickness of the reducing reaction, and ensure the accuracy of the reduction of the film thickness measurement.
[0052] The positive and negative electrode of the current tester 4 uses the first electrode sheet to the second electrode sheet. When the thickness of the reducing film is requ...
Embodiment 2
[0059] This embodiment provides an in-situ monitoring and reduced reaction method, such as Figure 4 As shown, specifically includes the following steps:
[0060] Step S1, measuring the surface of the solar cell 7 surface plated, the coating duration is T 1 ;
[0061] Step S2, measure the solar cell 7 to block the solar cell 7, measure the current I generated by the solar cell 7 by the beam irradiation membrane 1 size;
[0062] Step S3, repeating the steps of the above S1 and S2 described above to obtain N + 1 set of data pairs of the current size and the coating time, where N is greater than or equal to 2 natural number;
[0063] Step S4, based on the N + 1 set of data pairs obtained by obtaining the current size and the coating time, by linear fitting, current-time function curve of the current magnitude and the coating time;
[0064] Step S5, based on the resulting current-time function curve, the current maximum value in the current-time function curve i max And with current ma...
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