Resonator and method for manufacturing resonator
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- GUANGDONG CANCHIP TECH CO LTD
- Publication Date
- 2021-06-11
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Abstract
Description
technical field
[0001] The present application relates to electronic devices, and more particularly to resonators and methods of manufacturing resonators. Background technique
[0002] Surface acoustic wave (SAW: surface acoustic wave) devices are based on the piezoelectric effect of piezoelectric materials, electronic devices that use surface acoustic waves on the surface of piezoelectric materials to work, and use interdigital transducers formed on the surface of piezoelectric materials ( IDT: interdigital transducer) (a periodic structure of metal electrodes shaped like hands crossed) converts electrical input signals into surface acoustic waves and is a key component of today's communication devices.
[0003] For a SAW resonator, various performances will have a great impact on its performance, and then affect the stability and service life of the entire device including the SAW resonator and even the entire system. In general, the center frequency f of the existing TC-...