lcos structure and method of forming the same

Abstract

The present invention provides an LCOS structure and a method for forming the same. The LCOS structure includes: a silicon substrate, a liquid crystal layer and a transparent conductive layer above the silicon substrate; a conductive pad is formed in the silicon substrate, an opening exposing the conductive pad and at least a metal layer; the opening is located on the peripheral side of the liquid crystal layer; the metal layer is not distributed directly under the conductive pad; the conductive pad is located in the same layer and electrically connected to one of the at least one metal layer; The gap between the silicon substrate and the transparent conductive layer is filled with conductive glue. The transparent conductive layer and the conductive pad are electrically connected through the metal conductive particles in the conductive glue, and the connection of the electrical signal in the guiding process can reduce the size of the LCOS structure. The metal layer is not distributed directly under the conductive pad. In this way, even if the conductive pad is slightly damaged during the lamination process between the transparent conductive layer and the silicon substrate, the metal layer directly under the conductive pad is no longer damaged. reliability of the LCOS structure.

Description

technical field [0001] The invention belongs to the technical field of integrated circuit manufacturing, and in particular relates to an LCOS structure and a method for forming the same. Background technique [0002] An LCOS (Liquid Crystal on Silicon, liquid crystal on silicon) display is a reflective liquid crystal display device, which uses semiconductor silicon crystal technology to control liquid crystals to "project" color images. In the manufacturing process of the LCOS display, the electrical connection between the transparent conductive layers (eg, ITO) located on the upper and lower sides of the liquid crystal layer and the metal pads is an indispensable link. [0003] like figure 1 As shown, in an LCOS display, a metal pad 12 is formed on a silicon substrate 11, a liquid crystal layer 13 is formed above the silicon substrate 11, a transparent conductive layer 15 is formed above the liquid crystal layer 13, and the transparent conductive layer 15 and the metal pad...

AI Technical Summary

Problems solved by technology

The above two protruding directions protrude in opposite directions, occupying a lot of area, and it only completes the connection function and does not realize the display function, so the size of the LCOS panel with this structure is relatively large

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