Process for producing receiver substrate for semiconductor-on-insulator structure for radiofrequency applications and process for producing such structure
A technology of semiconductors and insulators, used in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., and can solve problems such as breakdown voltage drop
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[0066] The invention relates to a method of manufacturing a receiver substrate (30) of a semiconductor-on-insulator structure for radio frequency applications, comprising the steps of:
[0067] The method of the present invention is a reverse splicing method. refer to figure 2 , the method includes the step of providing a semiconductor substrate 10 comprising a base substrate 1 made of a single crystal material and a charge-trapping layer 2 made of polysilicon disposed on the base substrate, followed by a pair of charges The trapping layer 2 is oxidized to form an oxide layer 3 disposed on said charge trapping layer.
[0068] The charge-trapping layer 2 may be formed by epitaxy on the base substrate 1, or alternatively deposited thereon by chemical vapor deposition (CVD).
[0069] The charge-trapping layer 2 is at least partially oxidized at a temperature comprised between 750°C and 875°C.
[0070] Such a method makes it possible to form, by reverse bonding, a receiver sub...
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