Production method of metal electrode, metal electrode and display panel
A metal electrode and display panel technology, which is applied in the manufacture of circuits, electrical components, semiconductors/solid-state devices, etc., can solve the problem of metal electrodes being etched uncleanly, and achieve the effect of avoiding unclean etching
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[0036] It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application.
[0037] The thin film transistor is the core component of the display panel. In the preparation process of the metal electrode of the thin film transistor, the exemplary technology is to coat a photoresist on the metal thin film, and after exposure and development, use an etching process to pattern the metal thin film, The photoresist is further removed to pattern the metal electrode to obtain the metal electrode. The etching process includes dry etching and wet etching. Whether dry etching or wet etching is used, there may be over-etching and unclean etching. , disconnection, uneven etching or residual defects of etching solution, and when etching multiple layers of different metal electrode layers, the etching rate of the etching solution for different metal electrode layers is different, making i...
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