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Matching detection system of 93K test machine and to-be-tested product and detection method thereof

A technology of the product under test and detection system, which is applied in the direction of semiconductor/solid-state device testing/measurement, single semiconductor device testing, electrical measurement, etc., and can solve problems such as missed detection

Pending Publication Date: 2021-07-06
上海伟测半导体科技股份有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It is also easy to cause problems due to the intervention of human factors
For example, if the inspector misses the test item, it will cause missed inspection

Method used

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  • Matching detection system of 93K test machine and to-be-tested product and detection method thereof
  • Matching detection system of 93K test machine and to-be-tested product and detection method thereof
  • Matching detection system of 93K test machine and to-be-tested product and detection method thereof

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Embodiment Construction

[0032] The preferred embodiments described below are only examples, and those skilled in the art can devise other obvious variations. The basic principles of the present invention defined in the following description can be applied to other embodiments, variations, improvements, equivalents and other technical solutions without departing from the spirit and scope of the present invention.

[0033] Those skilled in the art should understand that in the disclosure of the present invention, the terms "vertical", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientation or positional relationship indicated by "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the present invention and The above terms should not be construed as limiting the present invention because the description is simplified rather than indicatin...

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Abstract

The invention relates to a matching detection system of a 93K test machine and a to-be-tested product and a detection method thereof. The detection method comprises the following steps: (S1) respectively setting to acquire configuration information of the 93K test machine and test item related information of a to-be-tested wafer; (S2) automatically receiving configuration information of the 93K test machine obtained through acquisition, and transcribing the configuration information to a comparison template defined by a template related to a wafer test item recorded by a wafer manufacturer; (S3) comparing the test item related information of the to-be-tested wafer with the information transcribed in the comparison template; and (S4) outputting a comparison result.

Description

technical field [0001] The invention relates to the detection system field of a wafer testing machine, in particular to a matching detection system and a detection method of a 93K testing machine and a product to be tested. Background technique [0002] At present, the integrated circuit manufacturing process is changing with each passing day. The diameter of the wafer reaches 300mm, the line of the die reaches 60nm or even finer, and the chip area is smaller. More than 10,000 dies can be produced on a wafer; the test of the dies is completed by the test system and the probe station (Prober) through timely and close cooperation. [0003] The performance of all dies is tested and analyzed by a wafer testing machine to detect failed dies, qualified dies, or dies that need to be repaired. Existing, common testing machines include J750 testing machine and Advantest 93K testing machine. The configuration of J750 testing machine is often relatively high, and its detection effici...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/26H01L21/66
CPCG01R31/2601H01L22/20
Inventor 傅郁晓杨恭亁骈文胜路峰关姜维
Owner 上海伟测半导体科技股份有限公司
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