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Planar nano gas sensor, array and preparation method thereof

A gas sensor, planar technology, applied in the direction of instruments, scientific instruments, measuring devices, etc., can solve the problems that hinder the development of intelligent sensing of gas sensors, precise detection of difficult target gases, poor selectivity, etc., achieve low power consumption, reduce Effect of operating temperature, full exposure

Pending Publication Date: 2021-07-09
HKUST SHENZHEN RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Most of the MOX gas sensors currently on the market have the disadvantages of high power consumption and poor selectivity
Gas sensors are mostly planar two-dimensional thin film structures and need to operate at high temperatures (300-400 degrees Celsius). The adsorption capacity between the target gas and the target gas is activated by heating to improve the response sensitivity to the gas, which makes these gas sensors not Suitable for low power consumption scenarios, but also facing the challenges of long-term stability and service life
At the same time, a single gas sensor responds to multiple gases, and it is difficult to accurately detect the target gas in the presence of interfering gases, which seriously hinders the development of gas sensors in the direction of intelligent sensing.

Method used

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  • Planar nano gas sensor, array and preparation method thereof
  • Planar nano gas sensor, array and preparation method thereof
  • Planar nano gas sensor, array and preparation method thereof

Examples

Experimental program
Comparison scheme
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Embodiment 1

[0055] Such as figure 1 As shown, a double-hole planar nano gas sensor provided in this embodiment includes a planar sensing electrode 1 , a sensing layer, an electrical insulating layer 3 and a micro heater 4 in order from top to bottom.

[0056] The sensing layer is formed after depositing nano-scale sensing materials in a double-hole substrate; the double-hole substrate is composed of a plurality of double-hole nanotubes; the double-hole nanotubes The tube is a nanotube with one end and the other open, and one end communicates with the other end; wherein, the nanoscale sensing material is deposited on the tube wall of the double-through-hole nanotube.

[0057] The heating area of ​​the micro-heater overlaps with the sensing area of ​​the planar sensing electrode in the vertical direction.

[0058] As a preferred specific implementation, the micro heater 4 provided in this embodiment is as figure 2 As shown, it includes a heating wire 43 and a first heating electrode 41 a...

Embodiment 2

[0068] This embodiment provides a method for preparing a double-through-hole planar nano-gas sensor described in Embodiment 1. The structure of the double-through-hole planar nano-gas sensor is as described in Embodiment 1, but here More description. Its preparation method is as Figure 8 shown, including the following steps.

[0069] Step S11: Deposit nanoscale sensing materials in the double-through-hole substrate to form a sensing layer, that is, after the deposition is completed, there will be nano-scale sensing materials on the upper and lower surfaces of the double-through-hole substrate and the inner walls of the nanotubes.

[0070] Preferably, the sensing material provided in this embodiment is SnO 2 、TiO 2 , ZnO or other metal oxide materials, the double-through-hole substrate provided in this embodiment is a double-through-hole 3D anodized aluminum template; the thickness of the double-through-hole anodized aluminum (AAO) template provided by this embodiment It i...

Embodiment 3

[0086] Such as Figure 5 As shown, a single through-hole planar nano gas sensor provided in this embodiment includes a planar sensing electrode 1 , a sensing layer and a micro heater 4 in order from top to bottom.

[0087] The sensing layer is formed after depositing nanoscale sensing materials in a single-hole substrate; the single-hole substrate is composed of a plurality of single-hole nanotubes; the single-hole nanotube The tube is a nanotube with one end open, the other end sealed, and one end connected to the other end; wherein, the nanoscale sensing material is deposited on the tube wall of the single through-hole nanotube.

[0088] The heating area of ​​the micro heater 4 overlaps with the sensing area of ​​the planar sensing electrode 1 in the vertical direction.

[0089] As a preferred specific implementation, the micro heater 4 provided in this embodiment is as figure 2 As shown, its micro-heater 4 is the same as the micro-heater described in Embodiment 1, and wi...

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Abstract

The invention discloses a planar nano gas sensor, an array and a preparation method thereof, and relates to the technical field of gas sensors, the gas sensor sequentially comprises a planar sensing electrode, a sensing layer, an electric insulation layer and a micro heater from top to bottom; the sensing layer is formed by depositing a nanoscale sensing material in the double-through-hole type substrate; the double-through-hole type substrate is composed of a plurality of double-through-hole type nanotubes; one end and the other end of each double-through-hole type nanotube are both open, and one end and the other end are communicated; the nanoscale sensing material is deposited on the tube wall of the double-through-hole type nanotubes; and the heating area of the micro heater is overlapped with the sensing area of the planar sensing electrode in the vertical direction. The planar nano gas sensor has the purposes of low power consumption and high performance.

Description

technical field [0001] The invention relates to the technical field of gas sensors, in particular to a planar nanometer gas sensor, an array and a preparation method thereof. Background technique [0002] Gas sensors, especially resistive gas sensors based on metal oxide semiconductors (MOX), are widely used in production and living fields such as environmental pollution monitoring, dangerous gas leakage, and chemical detection. With the development of Internet of Things technology and the promotion of precision medical strategy, traditional MOX gas sensors have great application potential in emerging fields such as wearable portable devices, point-of-care diagnostic devices (POCT), smart cities, and smart homes, and are also facing many challenges. challenge. [0003] Most of the MOX gas sensors currently on the market have the disadvantages of high power consumption and poor selectivity. Gas sensors are mostly planar two-dimensional thin film structures and need to opera...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12
CPCG01N27/12G01N27/125
Inventor 范智勇宋志龙汤雯颖陈卓
Owner HKUST SHENZHEN RES INST
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