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Inclination adjusting mechanism

A technology of tilt adjustment and connecting mechanism, which is applied to machine tool parts, grinding racks, grinding machine tools, etc., can solve problems such as parallelism changes, and achieve the effect of uniform thickness accuracy and high rigidity

Pending Publication Date: 2021-07-16
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there is a problem that when the workpiece held by the chuck table is ground while pressing from above with the grinding tool, a large load is applied to the inclination adjustment mechanism to shrink the inclination adjustment mechanism, and the holding surface will be opposite to each other. The inclination of the lower surface of the grinding tool, in other words, the parallelism will change

Method used

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Embodiment Construction

[0020] Hereinafter, embodiments of the present invention will be described with reference to the drawings. figure 1 The shown inclination adjustment mechanism 2 is disposed between the base 10 of the processing apparatus and the chuck table 30 having a holding surface 3001 for holding a workpiece such as a semiconductor wafer, and can adjust the inclination of the holding surface 3001 .

[0021] The inclination adjustment mechanism 2 is arranged, for example, in a grinding device that grinds a workpiece to be processed with a rotating grinding wheel to make it thinner, or in a device that grinds a wafer with a polishing pad formed of nonwoven fabric or the like to raise the wafer. Grinding and processing equipment for bending strength, etc.

[0022] The processing device equipped with the inclination adjustment mechanism 2 has, for example, a rough grinding unit and a fine grinding unit not shown in the figure, and the center of the base 10, which is a rotating turntable, is u...

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Abstract

The present invention provides an inclination adjusting mechanism which does not change the parallelism of a holding surface with respect to the lower surface of a grinding tool when a larger load is applied and a workpiece held by the holding surface is ground. The inclination adjusting mechanism includes an annular upper plate having an upper surface connected to a table and a lower surface inclined with respect to the upper surface; an annular lower plate having an upper surface parallel to the lower surface of the upper plate and a lower surface parallel to the upper surface of the upper plate and facing the upper surface of the base; an upper rotation mechanism that rotates the upper plate; a lower rotation mechanism that rotates the lower plate; a first bearing provided between the lower surface of the upper plate and the upper surface of the lower plate; a second bearing provided between the lower surface of the lower plate and the upper surface of the base; and a connection mechanism that connects the upper plate, the lower plate, and the base.

Description

technical field [0001] The present invention relates to an inclination adjustment mechanism for adjusting the inclination of a holding surface of a chuck table. Background technique [0002] For example, as disclosed in Patent Document 1 or Patent Document 2, the grinding device for grinding workpieces such as semiconductor wafers held on the holding surface of the chuck table by using a grinding tool has a The tilt adjustment mechanism that adjusts the parallelism of the holding surface on the lower surface of the tool. [0003] Patent Document 1: Japanese Patent Laid-Open No. 2004-082291 [0004] Patent Document 2: Japanese Patent Laid-Open No. 2008-238341 [0005] The tilt adjustment mechanism supports the lower surface of the chuck table at three points at equal intervals in the circumferential direction. Therefore, there is a problem that when the workpiece held by the chuck table is ground while pressing from above with the grinding tool, a large load is applied to ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B37/30B24B41/02B24B47/00B24B47/12B24B37/34
CPCB24B37/30B24B41/02B24B47/12B24B47/00B24B37/34B23Q3/04B24B41/068B23Q2220/004B23Q3/088B23Q1/0027H01L21/68764H01L21/68785H01L21/6838B24B37/04H01L21/67092B23Q3/186
Inventor 山端一郎
Owner DISCO CORP