Aging device, processing system and aging method

A technology of aging device and treatment liquid, which is applied in chemical instruments and methods, separation methods, devices for coating liquid on surfaces, etc. The effect of promoting degassing and improving liquid permeability

Pending Publication Date: 2021-07-23
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, the production efficiency of the coating device decreases
In addition, a large amount of expensive treatment liquid is consumed

Method used

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  • Aging device, processing system and aging method
  • Aging device, processing system and aging method
  • Aging device, processing system and aging method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0061] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0062]

[0063] figure 1 It is a figure which shows the structure of the coating apparatus 1 included in the processing system which concerns on one Embodiment of this invention. This coating apparatus 1 is an apparatus used in the manufacturing process of the polyimide film used as the base material of a flexible display. In the production process of the polyimide film, first, in the coating device 1, a high-viscosity polyimide precursor (polyamic acid) containing polyimide precursor (polyamic acid) is coated on the upper surface of the carrier substrate C made of glass. The treatment fluid is varnish. Then, in another apparatus, a polyimide film is produced by performing processes such as heating, decompression, and sintering of the varnish.

[0064] Such as figure 1 As shown, the coating device 1 of this embodiment has a liquid supply unit 10 , a coating unit 2...

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PUM

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Abstract

The invention provides an aging device, a processing system and an aging method, which can inhibit the usage amount of processing liquid and reduce initial dust generated from a filter. The aging device (2) is provided with a first tank (40), a second tank (50), a first branch pipe (63) and a second branch pipe (64). The first branch pipe (63) and the second branch pipe (64) extend in parallel between the first tank (40) and the second tank (50). Filters (F1, F2) can be attached to the paths of the first branch pipe (63) and the second branch pipe (64). A control unit (80) alternately executes a process for conveying processing liquid from the first tank (40) to the second tank (50) through the first branch pipe (63) and a process for conveying processing liquid from the second tank (50) to the first tank (40) through the second branch pipe (64). As a result, it is possible to reduce initial dust generated from the filters while suppressing the amount of processing liquid used.

Description

technical field [0001] The present invention relates to a technique of cleaning before using a filter for filtering a high-viscosity treatment liquid. Background technique [0002] Conventionally, in the manufacturing process of an organic EL display device or a liquid crystal display device, a coating device for coating a treatment liquid such as a photoresist on the surface of a substrate is used. About the conventional coating apparatus, it describes in patent document 1, for example. In the coating apparatus of Patent Document 1, the processing liquid is ejected from a slit die having a slit-shaped ejection port with respect to a substrate held by suction on a horizontally movable stage. [0003] Patent Document 1: Japanese Patent Laid-Open No. 2018-43219 [0004] Such a coating device is equipped with a filter for removing foreign matter contained in the coating liquid before spraying and coating the treatment liquid. New filters are usually pre-washed with cleaning ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D29/33B01D29/60B01D29/96
CPCB01D29/33B01D29/96B01D29/60B01D29/62B01D35/16B05C11/10B05C5/02B05C11/08
Inventor 芳川典生伊东隆介前向正刚松平一博川上刚史
Owner DAINIPPON SCREEN MTG CO LTD
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