Substrate transport device and operation method for substrate transport device

Abstract

A substrate transport device 101 that holds and transports a substrate 1. The substrate transport device 101 comprises a hand 20 that holds the substrate 1, a manipulator 30 to which the hand 20 is attached, and a substrate detector 60 that is arranged on the hand 20 and detects the distance to a principal surface of the substrate 1. The substrate detector 60 is preferably arranged at a tip end part of the hand 20. The substrate detector 60 is preferably an electrostatic capacitance sensor.

Description

technical field [0001] The invention relates to a substrate conveying device and an operating method thereof. Background technique [0002] Multiple processes are done in a clean room to manufacture semiconductor wafers. In the manufacture of semiconductor wafers, semiconductor wafers are accommodated in carriers (conveying chambers) and transported. [0003] Furthermore, there is known a substrate processing apparatus for detecting positional displacement of a wafer in a transfer chamber. For example, Patent Document 1 discloses such a substrate processing apparatus. [0004] The substrate processing apparatus disclosed in Patent Document 1 includes a mapping device and a wafer misalignment detection device. The mapping device and the wafer position deviation detection device are installed at the wafer entrance and exit of the transfer bay opener that opens and closes the door of the transfer bay. [0005] The surveying device includes a plurality of pairs of a light pr...

AI Technical Summary

Problems solved by technology

There are cases where it is difficult to detect the positional deviation of a wafer whose inclination angle is very small by the mapping device and the wafer positional deviation device installed near the wafer entrance and exit.

The mapping device and the wafer position offset device have room for improvement

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