Motion track planning method of precision motion platform

Abstract

The invention discloses a motion track planning method for a precision motion platform. The method comprises the steps of determining a motion track constraint which comprises a first parameter, a second parameter and a third parameter; inputting the first parameter, the second parameter and the third parameter into a motion track function, outputting a motion track ideal position curve changing along with the motion time, and the motion track function being constructed according to the heat effect of a driving motor of the precise motion platform and the impact effect caused by acceleration and / or deceleration of the precise motion platform; and performing data discretization processing on the ideal position curve of the motion track to obtain a motion track discrete position sequence serving as reference input of a servo control module of the precision motion platform.

Description

technical field [0001] The invention belongs to the field of ultra-precision motion, and in particular relates to a motion track planning method of a precision motion platform. Background technique [0002] Ultra-precision motion system is an important part of ultra-precision manufacturing and processing equipment, and has important applications in aerospace, laser technology, semiconductor industry and other fields. In order to reduce the impact caused by the high acceleration and deceleration of the motion platform and the adverse effects of the heat generated during the motion process on the system, it is necessary to plan and control the motion trajectory. The algorithm of the trapezoidal motion trajectory is relatively simple, but there is a sudden change in acceleration during the movement, which is easy to stimulate the system oscillation and affect the accuracy of the positioning system; the algorithm of the S-type motion trajectory is more complicated than the trape...

AI Technical Summary

Problems solved by technology

[0003] The existing technology uses the discrete numerical integration method to plan the trajectory of the ultra-precision motion system. The algorithm of this method is simple and easy to implement, but the required trajectory needs to be segmented: the third-order trajectory needs to be divided into 7 segments, and the fourth-order trajectory needs to be divided into 15 segments, it is easy to make mistakes in the calculation process, and using this method in higher-order trajectories will increase the computational burden of the computer, resulting in a decrease in system efficiency

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