Automatic coating system

Abstract

The invention provides an automatic coating system. The automatic coating system comprises a vacuum chamber device, a transfer chamber device and a suspension operation chamber, a rotating frame and a rotating frame driving device are arranged in the vacuum chamber device, and a hanging plate is arranged on the rotating frame. A manipulator device and a first rotating device are arranged in the transfer chamber device. A rail changing device and a second rotating device are arranged in the suspension operation chamber. The rail changing device is used for connecting a transfer chamber and the suspension operation chamber. The transfer chamber is in a vacuum state when performing exchange operation with the vacuum chamber, and is in an atmospheric state when performing exchange operation with the suspension operation chamber. The sum of the coating time of a vacuum chamber, the vacuumizing time of the transfer chamber, the exchange time of the transfer chamber and the vacuum chamber, the vacuum breaking time of the transfer chamber and the exchange time of the transfer chamber and the suspension operation chamber is equal to the operation time of the suspension operation chamber. According to the automatic coating system, the coating efficiency and the coating quality can be improved, and the occupied area is small.

Description

technical field [0001] The invention relates to the field of optical technology coating, in particular to an efficient automatic coating system. Background technique [0002] In the field of optical technology coating, improving the efficiency and quality of coating and expanding the scope of application of coating have always been the goals pursued by the field of vacuum coating technology. [0003] Figure 1 to Figure 3 It shows a current coating system. As shown in the figure, the coating system mainly includes a process vacuum chamber 1, a handling vacuum chamber 2, and an automatic loading and unloading device 20. The finished product in the process chamber passes through the manipulator 9 in a vacuum state. , transfer the hanging boards 10 to the transfer room turret 8, when all the hanging boards are transferred to the transfer room turret, the valve 4 is closed, the air is released, the door 3 is opened, and the door opening position is identified by the door limit s...

AI Technical Summary

Problems solved by technology

[0004] 1. The failure rate of the manipulator in the vacuum state is high, and the frequency of jamming is high;

[0005] 2. Slow tempo and low efficiency;

[0006] 3. High requirements for installation and adjustment;

[0007] 4. The flexibility of the hanging board is low. If the large hanging board is replaced, the entire manipulator and automatic loading and unloading device may need to be changed;

[0008] 5. The positioning of the robot in the automatic loading and unloading device is not accurate, and it is easy to collide with the hanging board, and the hanging board on the automatic assembly line is easy to deviate;

[0009] 6. Large footprint

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