Capacitive humidity sensor and manufacturing method thereof

A technology of humidity sensor and manufacturing method, which is applied in the direction of material capacitance, instruments, scientific instruments, etc., can solve the problems of difficult adsorption and release of water molecules, low sensor sensitivity, and long response time, so as to reduce hysteresis characteristics, improve sensitivity, The effect of meeting the test requirements

Inactive Publication Date: 2021-09-03
苏州锐光科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since the upper electrode is covered with a water-absorbing medium layer, the water molecules in the middle medium layer are not easily adsorbed and released, resulting in adverse effects such as low sensor sensitivity, large hysteresis, and long response time.

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  • Capacitive humidity sensor and manufacturing method thereof
  • Capacitive humidity sensor and manufacturing method thereof

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Embodiment Construction

[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0024] as attached Figure 1-2 In the shown capacitive humidity sensor, the capacitive humidity sensor adopts a substrate 1, an insulating layer 2, a bottom electrode layer 3, a moisture-sensitive material layer 5 and an upper electrode layer 6 arranged in sequence from bottom to top, and the bottom electrode layer 3 The bottom electrode pad 4 is etched at the end edge, and the upper electrode pad 7 is etched at the end edge of the upper electrode layer 6. The...

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Abstract

The invention discloses a capacitive humidity sensor and a manufacturing method thereof, and particularly relates to the technical field of humidity sensors, the capacitive humidity sensor adopts a substrate, an insulating layer, a bottom electrode layer, a humidity-sensitive material layer and an upper electrode layer which are sequentially arranged from bottom to top, a bottom electrode bonding pad is etched at the edge of the end part of the bottom electrode layer, an upper electrode bonding pad is etched at the edge of the end part of the upper electrode layer, and the humidity-sensitive material layer adopts a snakelike arrangement structure. By adopting the snakelike bulge structure design of the humidity-sensitive material, the contact area between external air and the humidity-sensitive material is increased, and the moisture absorption and dehumidification speed of the humidity-sensitive material is improved, so that the sensitivity of the humidity sensor is improved, the response time is shortened, the hysteresis characteristic is reduced, and the test requirement for higher precision is met.

Description

technical field [0001] The invention relates to the technical field of humidity sensors, and more specifically, the invention relates to a capacitive humidity sensor and a manufacturing method thereof. Background technique [0002] Humidity sensors are widely used in the fields of aerospace, biomedicine, industrial and agricultural production, and atmospheric environment. Some of these fields have higher requirements for the dynamic response characteristics of humidity sensors, including sensitivity, hysteresis characteristics, and response time. Commercial humidity sensors made by MEMS technology are mainly divided into three categories according to their working principles: capacitive humidity sensors, resistive humidity sensors and piezoresistive humidity sensors. The piezoresistive humidity sensor has a movable structure of a suspended film or a cantilever beam, and its stability is poor; the resistive humidity sensor is greatly affected by the ambient temperature, and i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/22
CPCG01N27/223G01N27/225G01N27/227
Inventor 不公告发明人
Owner 苏州锐光科技有限公司
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