Crystal control rotation integrated control system based on vacuum coating
A technology of integrated control system and vacuum coating, applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problem of lack of integrated control system, etc.
Pending Publication Date: 2021-09-07
湖南宇诚精密科技有限公司
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However, the control systems in the prior art generally adopt the principle of single function and single control, that is to say, most of the multifunctional transmission devices and execution terminals are equipped with multiple sets of functio
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[0032]In order to better understand the technical solution in the present application, the present application embodiments will be described in connection with the drawings in the present application embodiments, and will be described in conjunction with the drawings in the present application embodiment. Example is only a part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative labor premises, all of the present application protected.
[0033] It should be noted that when the element is referred to as "fixed to" or "set to" other element, it can be directly set directly on the other element or indirectly; when a component is called "connection As another component, it can be directly connected to another component or indirectly connected to another component.
[0034] Is to be understood that the term "length", "w...
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The invention discloses a crystal control rotation integrated control system based on vacuum coating. Compared with the prior art, the crystal control rotation integrated control system comprises an upper computer used for monitoring coating process equipment and transmitting and receiving control signals, a PLC main control module connected with the upper computer, a control management module connected with the PLC main control module, a first control module, a second control module, a rotation driving execution module, a rotating stand mounting execution module, a water cooling circulation execution module, a temperature regulation and control detection module, a gas regulation and control detection module, a film thickness regulation and control detection module, a communication session system, a coating execution terminal and a coating detection terminal; wherein the first control module and the second control module are connected with the control management module; the rotation driving execution module, the rotating stand mounting execution module and the water cooling circulation execution module are connected with the first control module; the temperature regulation and control detection module, the gas regulation and control detection module and the film thickness regulation and control detection module are connected with the second control module; the communication session system is in communication connection with the first control module and the second control module; and the coating execution terminal and the coating detection terminal are arranged on the coating process equipment and are connected with the communication session system. Compared with the prior art, a multifunctional transmission device and the execution terminal can be integrally controlled to carry out coating operation, and the coating control precision is improved.
Description
Technical field [0001] Technical Field The present application relates to vacuum coating a rotation control system, and more particularly, relates to a crystal-controlled rotary particular integrated control system based on vacuum deposition. Background technique [0002] In recent years, vacuum technology show attractive market prospects in the high-tech industry development. Vacuum coating machine is now very common coating process equipment, has been widely used in the preparation of the metal thin film semiconductor devices, and among other functional materials. Vacuum coating machine generally comprises a vacuum chamber, a workpiece and the turret gear. Coater coating process requires the workpiece mounted on a workpiece on the carousel and placed in the vacuum chamber, the transmission driven turret rotates the workpiece, so that the workpiece receiving a plasma emission target before the target time zone by angles from and depositing the deposition, thereby completing the ...
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Login to view more IPC IPC(8): C23C14/54C23C14/34
CPCC23C14/54C23C14/34
Inventor 蔡国龚涛谢俊
Owner 湖南宇诚精密科技有限公司
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