Crystal control rotation integrated control system based on vacuum coating

Abstract

The invention discloses a crystal control rotation integrated control system based on vacuum coating. Compared with the prior art, the crystal control rotation integrated control system comprises an upper computer used for monitoring coating process equipment and transmitting and receiving control signals, a PLC main control module connected with the upper computer, a control management module connected with the PLC main control module, a first control module, a second control module, a rotation driving execution module, a rotating stand mounting execution module, a water cooling circulation execution module, a temperature regulation and control detection module, a gas regulation and control detection module, a film thickness regulation and control detection module, a communication session system, a coating execution terminal and a coating detection terminal; wherein the first control module and the second control module are connected with the control management module; the rotation driving execution module, the rotating stand mounting execution module and the water cooling circulation execution module are connected with the first control module; the temperature regulation and control detection module, the gas regulation and control detection module and the film thickness regulation and control detection module are connected with the second control module; the communication session system is in communication connection with the first control module and the second control module; and the coating execution terminal and the coating detection terminal are arranged on the coating process equipment and are connected with the communication session system. Compared with the prior art, a multifunctional transmission device and the execution terminal can be integrally controlled to carry out coating operation, and the coating control precision is improved.

Description

Technical field [0001] Technical Field The present application relates to vacuum coating a rotation control system, and more particularly, relates to a crystal-controlled rotary particular integrated control system based on vacuum deposition. Background technique [0002] In recent years, vacuum technology show attractive market prospects in the high-tech industry development. Vacuum coating machine is now very common coating process equipment, has been widely used in the preparation of the metal thin film semiconductor devices, and among other functional materials. Vacuum coating machine generally comprises a vacuum chamber, a workpiece and the turret gear. Coater coating process requires the workpiece mounted on a workpiece on the carousel and placed in the vacuum chamber, the transmission driven turret rotates the workpiece, so that the workpiece receiving a plasma emission target before the target time zone by angles from and depositing the deposition, thereby completing the ...

AI Technical Summary

Problems solved by technology

However, the control systems in the prior art generally adopt the principle of single function and single control, that is to say, most of the multifunctional transmission devices and execution terminals are equipped with multiple sets of functional control systems, and multiple sets of functional control systems need to be operated separately. The system cooperates to complete the coating work, lacking an integrated control system to realize the overall control of the coating operation

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