Integrated circuit manufacturing process virtual simulation method and device

A manufacturing process and integrated circuit technology, applied in the field of devices, servers, readable storage media, and integrated circuit manufacturing process virtual simulation methods, can solve the problems of lack of advanced teaching methods, large investment in integrated circuits, poor experimental equipment in colleges and universities, etc., to achieve The effect of reducing the test cycle, improving production efficiency and reducing production costs

Pending Publication Date: 2021-09-07
CHANGZHOU AUTOSMT INFORMATION TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Most colleges and vocational schools set up majors and courses related to integrated circuit technology. However, due to the large investment in integrated circuit manufacturing equipment, poor experim

Method used

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  • Integrated circuit manufacturing process virtual simulation method and device
  • Integrated circuit manufacturing process virtual simulation method and device
  • Integrated circuit manufacturing process virtual simulation method and device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0068] See attached figure 1 , the present embodiment provides a method for virtual simulation of an integrated circuit manufacturing process, comprising the following steps:

[0069] Step S100, acquiring first data, the first data including: the type of IC chip, the manufacturing process corresponding to the type of IC chip, and the equipment corresponding to the manufacturing process.

[0070] Specifically, the type set, process set, and equipment set of IC chips are preset in the system, and the user selects the type of IC chip according to the type set, and then selects and sets the type of IC chip from the process set of the manufacturing process of the type IC chip. For each step of the manufacturing process, select the equipment corresponding to each step of the manufacturing process of this type of IC chip from the equipment set of the integrated circuit chip VR virtual factory to obtain the first data.

[0071] See attached figure 2 , the type set includes 10 typic...

Embodiment 2

[0086] Based on the same inventive concept as the virtual simulation method of the integrated circuit manufacturing process in the foregoing embodiment 1, the present invention also provides a virtual simulation device for the integrated circuit manufacturing process, the device comprising:

[0087] The first acquiring unit 101 is configured to acquire first data, the first data including: the type of IC chip, the manufacturing process corresponding to the type of the IC chip, and the equipment corresponding to the manufacturing process;

[0088] The first computing unit 102 is configured to design second data, the second data being the flow sequence of the IC chip manufacturing process;

[0089] The first processing unit 103 is configured to construct a structural 3D simulation of the functional area of ​​the IC chip according to the second data;

[0090] The first judging unit 104 judges whether the second data is correct or not through visualization, and if it is correct, e...

Embodiment 3

[0103] Based on the same inventive concept as the virtual simulation method of integrated circuit manufacturing process in the foregoing embodiments, the present invention also provides a server for virtual simulation of integrated circuit manufacturing process, such as Figure 4 as shown, Figure 4 It is an exemplary electronic device in Embodiment 4, including a memory 304, a processor 302, and a computer program stored in the memory 304 and operable on the processor 302. When the processor 302 executes the program, it realizes the aforementioned integration The steps of any method of the circuit manufacturing process virtual simulation method.

[0104] Among them, see the attached Figure 4 , bus architecture (represented by bus 300), which may include any number of interconnected buses and bridges, bus 300 will include various circuits represented by one or more processors represented by processor 302 and memory represented by memory 304 link together. The bus 300 may a...

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PUM

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Abstract

The invention discloses an integrated circuit manufacturing process virtual simulation method and device, a server and a readable storage medium, and belongs to the technical field of intelligent engineering, and the method comprises the steps: obtaining the type of an IC chip of an integrated circuit; establishing first data, second data, third data and fourth data, and constructing 3D simulation of the structural change of the functional area of the IC chip; correcting the first data, the second data, the third data and the fourth data through visual inspection judgment; and displaying the change of each layer of structure of the IC chip before and after each step of technological process and equipment processing, and simulating the manufacturing process of an actual integrated circuit chip factory. According to the method, different types of integrated circuit manufacturing technological processes and engineering parameters are designed through the typical type of the IC chip of the integrated circuit, the correctness of the check design is verified through 3D simulation of the functional area structure of the IC chip, and the test run period can be greatly shortened.

Description

technical field [0001] The invention belongs to the technical field of intelligent engineering, in particular to a virtual simulation method, device, server and readable storage medium of an integrated circuit manufacturing process. Background technique [0002] Integrated circuit manufacturing is the core of the electronic manufacturing industry. There are many types of integrated circuits, complex manufacturing processes, at least 100 procedures, and various types of equipment. Manufacturing engineers must repeatedly try production, modify repeatedly until the final finalization, to ensure the feasibility and accuracy of the operating procedures. Correctness, and then put into actual mass production. This makes the production preparation time very long, and the investment is very large. As market competition intensifies, product lead times must be shortened and production costs must be controlled. [0003] Most colleges and vocational schools set up majors and courses re...

Claims

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Application Information

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IPC IPC(8): G06F30/367G06Q50/20H01L21/67
CPCG06F30/367G06Q50/205H01L21/67276Y02P90/30
Inventor 龙绪明闫明龙震顾晓青黄昊李巍俊袁磊刘珊珊詹明涛许晓健
Owner CHANGZHOU AUTOSMT INFORMATION TECH
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