Antenna device of MPCVD equipment

Abstract

The invention discloses an antenna device of MPCVD (Mobile Plasma Chemical Vapor Deposition) equipment. The antenna device comprises an antenna body; a cover plate is arranged on the top of the antenna body; a closed accommodating cavity is formed between the cover plate and the antenna body; a water inlet channel is arranged at the top of the antenna body along the axis; and an independent water outlet channel is arranged on the outer side of the water inlet channel. Water is injected into the inner wall of the antenna body through the water inlet channel to cool the antenna body and is discharged through the water outlet channel to cool the antenna body. Water in the sealed cavity can flow upwards through the water outlet channel between a middle wall pipe and an outer wall pipe and is discharged outwards through a water outlet clamping sleeve connector on a water outlet block, and the antenna body can be fully cooled. As the antenna body is arranged to be in an inverted cone shape, in actual use, the microwave feedback is low, the microwave conduction loss is small, and the obtained plasma flame is high in energy density, good in symmetry, uniform in temperature distribution and good in controllability.

Description

Technical field [0001] The present invention relates to the field of MPCVD technology, and in particular to an antenna device for MPCVD equipment. Background technique [0002] The antenna used in MPVCD equipment is the core component. Different manufacturers have different designs, depending on the design of the microwave power supply and cavity. Different antennas have different effects on the plasma flame. The purpose is to obtain the lowest microwave feedback, reduce microwave loss, and obtain a controllable plasma flame. [0003] However, when the current MPVCD equipment is in use, the microwave generated by the microwave power supply is introduced into the cavity, and the loss in the microwave conduction process is large. The shape of the plasma flame obtained is not ideal, the controllability of the plasma flame is poor, and the cooling effect is poor, resulting in its service life being limited. limit. [0004] Therefore, it is necessary to provide an antenna devic...

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Problems solved by technology

[0006] The object of the present invention is to provide a kind of MPCVD equipment antenna device, to solve the problem that the microwave generated by the existing microwave power supply in the above background technology is introduced into the cavity, the loss of the microwave conduction process is relatively large, the shape of the obtained plasma flame is not ideal, and the controllability of the plasma flame is poor. , and the cooling effect is poor, resulting in a limited service life

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