An interdigital array device and detection method for measuring wall liquid film thickness
A detection method and technology of liquid film thickness, applied in electromagnetic measurement devices, electric/magnetic thickness measurement, etc., can solve the problems of complex operation, poor applicability, and inability to meet real-time measurement requirements at the same time, and achieve simple operation, strong applicability, simple structure
Active Publication Date: 2022-05-17
SHANGHAI JIAOTONG UNIV +1
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Problems solved by technology
In addition, the existing liquid film thickness sensors cannot meet the real-time measurement requirements for the spatial distribution of thin liquid films on flat pipe walls and curved pipe walls at the same time, and have disadvantages such as complicated operation and poor applicability
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[0036] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0037] The following is attached Figure 1 to Figure 4 The present invention is described in further detail.
[0038] like figure 1 As shown, an interdigital array membrane sensor for spatial measurement of thin liquid film thickness on plane and curved pipe walls, including sensing interdigital electrodes 1, excitation interdigital electrodes 2, shielding interdigital electrodes 3, thin-film circuit substrate 4, Induction interdigital electrode data line 5, induction interdigital electrode data line ...
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The present application provides an interdigital array detection device for measuring the thickness of a liquid film on a wall. The device includes: a thin-film circuit substrate; N rows of inductive interdigital electrodes are arranged on the front surface of the thin-film circuit substrate, where N is An integer not less than 2; the front surface of the thin-film circuit substrate is provided with M columns of excitation interdigital electrodes, and the M columns of excitation interdigital electrodes are intersected with the N rows of induction interdigital electrodes, and M is not less than 2 Integer; shielding interdigital electrodes are arranged adjacent to the sensing interdigital electrodes in every two rows; wherein, the excitation interdigital electrodes are arranged in every two columns, and the sensing interdigital electrodes are arranged in parallel between every two rows.
Description
technical field [0001] The invention belongs to the technical field of multiphase flow flow parameter measurement, and in particular relates to an interdigital array film sensor for realizing spatial measurement of thin liquid film thickness on plane and curved pipe walls. Background technique [0002] Thin liquid film measurement technology has a wide range of technical application requirements in the fields of nuclear energy, petrochemical, power and refrigeration. However, there have always been some shortcomings in the accurate measurement of the spatial distribution of thin liquid films on the walls of pipes or containers. The intrusion effect of existing liquid film thickness sensors is serious, and most of them can only be used for single-point measurement of thicker liquid films. For thin liquid film on the wall, especially when the liquid film thickness is less than 0.5mm, the sensor measurement signal usually becomes extremely insensitive. In addition, the existi...
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IPC IPC(8): G01B7/06
CPCG01B7/06
Inventor 刘莉刘帅顾汉洋张琦应秉斌
Owner SHANGHAI JIAOTONG UNIV