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Device for the chromatic confocal measurement of a local height and/or orientation of a surface of a sample and corresponding methods for measuring a height or a roughness of a sample

A technology of color confocal and measuring equipment, which is applied in the direction of measuring devices, adopting optical devices, image data processing, etc., and can solve problems such as sensitivity not raised

Pending Publication Date: 2021-10-08
SCI & TECH IND DE LA LUMIERE SA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

On the other hand, this document does not propose any solution that allows increasing the sensitivity of the device to the roughness of the surface being measured

Method used

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  • Device for the chromatic confocal measurement of a local height and/or orientation of a surface of a sample and corresponding methods for measuring a height or a roughness of a sample
  • Device for the chromatic confocal measurement of a local height and/or orientation of a surface of a sample and corresponding methods for measuring a height or a roughness of a sample
  • Device for the chromatic confocal measurement of a local height and/or orientation of a surface of a sample and corresponding methods for measuring a height or a roughness of a sample

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Experimental program
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Embodiment Construction

[0053] A device 1 or comparator for measuring the local orientation and / or height of a surface S of a sample comprises in a manner known per se:

[0054] - a light source 2, such as a white light emitting diode or any other white light source, configured to generate a polychromatic light beam 9,

[0055] - a projection objective comprising in turn a collimator 3 and an axial chromatic aberration objective 4 (or light pen) configured to focus the beam 9 generated on the surface S of the sample and to receive the beam 9 reflected from the surface S,

[0056] - a spectroscopic analysis system 5 such as a spectrometer configured to determine the spectral distribution of the beam 9 reflected after it has passed through the projection objective,

[0057] - Signal processing means that can analyze the spectral distribution in order to calculate the axial position of the surface S.

[0058] The light source 2 , the projection objective and the spectrometer 5 can be connected by at le...

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Abstract

The invention concerns a device (1) for the chromatic confocal measurement of a local height and / or orientation of a surface (S) of a sample comprising - a light source (2) configured to generate a polychromatic light beam (9) - a projection lens (4) comprising a lens (4) with axial chromatism configured to apply the light beam (9) to the surface (S) of the sample, - an optical sensor, configured to receive a light beam (9) reflected by the surface (S) of the sample and measure a total energy of the reflected light beam (9) received during an integration interval, - a scanning system (10), coupled to the projection lens (4) and configured to move the propagation axis of the light beam (9) relative to the projection lens (4), such that the total energy measured by the optical sensor corresponds to a dynamic spatial average of the total energy of the light beam (9) reflected by the surface (S) of the sample.

Description

technical field [0001] The present invention relates generally to the field of inspection and optical inspection of components, and more particularly to the field of using optical devices to measure the precise orientation and / or height of a sample surface. Background technique [0002] Until now, there exist measuring devices of the optical comparator type comprising optical sensors, which allow precise and contact-free measurement of the local orientation and / or height of the sample surface. The beam diameter at the sample surface (commonly referred to as the "spot") is usually comprised between 1.5 μm and 50 μm, depending on the chosen objective. [0003] However, these optical comparators are sensitive to the roughness of the surface to be inspected, which is likely to result in a marked lack of repeatability of the measurements. But these optical comparators are mainly used to inspect parts with roughness exceeding several microns or tens of microns. However, due to t...

Claims

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Application Information

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IPC IPC(8): G01B11/06G01B11/30
CPCG01B11/303G01B11/0608G01B2210/50G06T7/50
Inventor 杰罗姆·盖拉德-格罗利斯塞巴斯蒂安·热朗加布里埃尔·穆修
Owner SCI & TECH IND DE LA LUMIERE SA