Fast, highly accurate, full-FEM surface acoustic wave simulation
A technology of acoustic wave device and unit block, applied in the field of fast and high-precision full finite element surface acoustic wave simulation
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[0152] A hierarchical cascade algorithm is implemented on a commercial Matlab platform using a custom mesh generation algorithm and a FEM engine. Mesh generation is based on a modified version of Chew's second Delaunay refinement algorithm; in particular, mechanisms are introduced to relax the mesh fidelity criteria within the film. Use triangular meshes near the electrodes: The increased element density around the electrode corners is very useful for modeling the charge density distribution, which improves the accuracy of the simulated capacitance. Such as Figure 2B As shown, the mesh further from the surface is regular and consists of quadrilateral elements. Simulation speeds are reported for an old desktop computer (CPU i7-2600k, 3.4GHz, 32GB RAM), with calculations distributed across four parallel threads.
[0153] A. 42°YX cut LiTaO 3 2D synchronized resonators on
[0154] The first example is a 42°YX cut LiTaO 3 A synchronous resonator on a substrate with the follo...
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