Position detection and calibration device for MEMS sensor

Abstract

The invention provides a position detection and calibration device for an MEMS sensor, the device is of a central symmetry structure, the device comprises a substrate, a central supporting table, movable electrodes, fixed electrodes, cantilever beams, inclined beams and annular beams, the central supporting table is located in the center of the substrate, the centers of the four edges of the central supporting table are connected with the movable electrodes through the cantilever beams, the four corners of the center supporting table are connected with inclined beams, the inclined beams are connected with annular beams, the other ends of the annular beams are fixed to the substrate through aiming points, the movable electrodes are opposite to the fixed electrodes to form comb-tooth-shaped capacitor pairs which are distributed in a crossed mode at equal intervals, and the fixed electrodes are fixed to the substrate through anchor points. The device is used for detecting whether the MEMS sensor is located in the center of the micro platform or not, the purposes of high-sensitivity detection and calibration of the position of the MEMS sensor are achieved, and high-precision calibration of the position of the MEMS sensor is achieved.

Description

technical field [0001] The invention relates to the technical field of position calibration of MEMS sensors, more specifically, to a position detection and calibration device for MEMS sensors. Background technique [0002] With the rapid development of micro-electromechanical systems (MEMS), MEMS sensors are widely used in automotive electronics, aerospace, weaponry, medical equipment and other fields. However, after the MEMS sensor has been used for a period of time, its sensitivity will deviate due to environmental factors such as aging and temperature, and the accuracy of the signal measured by the MEMS sensor is directly related to the performance of the product, so the sensitivity of the output of the MEMS sensor needs to be calibrated. [0003] In the prior art, there are mainly two methods for calibrating MEMS sensors. One is to perform off-line or on-line calibration through additional standard calibration devices. The other is the MEMS sensor self-calibration that...

AI Technical Summary

Problems solved by technology

[0004] However, in the process of calibrating the sensitivity of the MEMS sensor, the misalignment between the MEMS sensor and the center of the micro platform will affect the accuracy of the calibration.

Existing micro-platforms for MEMS sensor calibration ignore this error

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