Hybrid process control method and device, equipment and medium

Abstract

The embodiment of the invention relates to a hybrid process control method and device, equipment and a medium. The method comprises the steps of: obtaining hybrid process operation groups related to the process formula of an etching cavity in etching equipment, and enabling different process formulas to correspond to different hybrid process operation groups; obtaining conversion rules of the different hybrid process operation groups; and controlling the etching equipment to be automatically switched to a target hybrid process operation group associated with a goods-ordering process formula according to the goods-ordering process formula of the real-time goods-ordering requirement of the target etching cavity and the requirement of the conversion rules. In the switching process, manual participation is not needed, the machine does not need to stop the operation technological process, and economic losses caused by machine production halt and manual operation errors or missing in the process switching period are avoided.

Description

technical field [0001] The embodiments of the present application relate to the technical field of semiconductor manufacturing, and in particular to a hybrid process control method, device, equipment, and medium. Background technique [0002] With the rapid development of integrated circuit manufacturing technology, the market demand for semiconductor products is getting higher and higher, which puts forward higher requirements for the production efficiency and shipment quality of semiconductor production lines. The etching process is one of the key links in the semiconductor production process, and its efficiency and shipment yield directly affect the shipment efficiency and yield of semiconductor products. The etching process in the semiconductor industry generally adopts multi-cavity and multi-process switching production processes to improve the production efficiency and utilization of etching equipment. [0003] In the traditional etching process, the multi-cavity and ...

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Problems solved by technology

[0004] Manual operations are prone to operational errors or omissions, resulting in unnecessary economic losses

In addition, the etching process has different processes running in the same machine cavity. It is necessary for the machine to stop the current process and then switch to the new etching process, resulting in idle machines and loss of production capacity.

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