Method for controlling silane to be on line

A silane, manual control technology, applied in the container discharge method, container filling method, equipment discharged from the pressure container, etc., can solve the safety risk and other problems, and achieve the effect of solving the system stamping

Pending Publication Date: 2021-11-23
天合光能(宿迁)光电有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a preparation method for controlling silane on-line, which has the advantages of manually controlling the pressure increase and having a good control effect on the safety of the system, and solves the problem of safety risk mentioned in the above-mentioned background technology

Method used

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  • Method for controlling silane to be on line
  • Method for controlling silane to be on line

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] The method for controlling silane on-line includes automatic control and manual control, and its automatic control includes the following steps:

[0037] A1. Open the safety lock of the pneumatic valve on the silane line;

[0038] A2. Insert the silane gas pipe into the starting valve to form pressure. Insert the silane gas pipe into the starting valve to form the pressure. The method of forming pressure is: when the ISO tube bundle pneumatic valve 2 is open, the normally open pipe 4 is blocked. At this time, the lotus Pan gas source 1, connected to the ISO tube bundle pneumatic valve 2, are connected together, and the pressure is formed to open the valve;

[0039] A3, system control switch;.

Embodiment 2

[0041] Its manual control includes the following steps:

[0042] B1. First connect all the pipes,

[0043] B2. Manually control the normally open pipeline 4 to slowly open the ISO tube bundle pneumatic valve 2. In step B2 of the manual control process, when the ISO tube bundle pneumatic valve 2 is opened, the silane gas will slowly pass through, reducing the supply of silane gas and preventing the flow of silane The stamping produced during the operation will cause harm to the equipment.

[0044] The beneficial effects of the present invention are: the silane ISO vehicle is full of 4000kg, the pressure is about 1700psi in summer and 1400psi in winter, the system defaults, the valve opens instantly every time it goes online, there is a serious safety risk, and the manual control of pressure increase is good for the safety of the system For the control function, use the three-way valve 3 and the hose, connect the lotus disc interface to the side of the three-way valve 3, connec...

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PUM

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Abstract

The invention discloses a method for controlling silane to be on line, and relates to the technical field of special gas. The method comprises a three-way valve, an ISO tube bundle pneumatic valve, a lotus disc gas source and manual gas source control, and the three-way valve is used for introducing silane gas between the ISO tube bundle pneumatic valve and the lotus disc gas source; and the ISO tube bundle pneumatic valve is used for outputting the silane in a silane vehicle, and the lotus disc gas source is used for controlling the pressure in a pipeline. Pressure increasing is manually controlled, the safety of a system is well controlled, the three-way valve and a hose are used, a lotus disc connector is connected to one side of the three-way valve, an ISO vehicle pneumatic valve pipeline is connected to one side of the three-way valve, system ventilation is conducted, due to the fact that the pressure is high (120 kg), manual control is conducted to slowly open a valve in an ISO vehicle tube bundle, the pressure in the pipeline is detected in real time, the pressure is gradually increased, the danger of system stamping is avoided, the state of each valve is protected, and the valves are buffered; and the stability of the whole system is better controlled.

Description

technical field [0001] The invention relates to the technical field of special gases, in particular to a preparation method for controlling silane on-line. Background technique [0002] As a gas source that provides silicon components, silane can be used to manufacture high-purity polycrystalline silicon, single crystal silicon, microcrystalline silicon, amorphous silicon, silicon nitride, silicon oxide, heterogeneous silicon, and various metal silicides. Because of its high purity and fine control, it has become an important specialty gas that cannot be replaced by many other silicon sources. Silane is widely used in the microelectronics and optoelectronics industries for the manufacture of solar cells, flat panel displays, glass and steel coatings, and is the only intermediate product of large-scale production of granular high-purity silicon in the world so far. The high-tech applications of silane are still emerging, including the manufacture of advanced ceramics, compos...

Claims

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Application Information

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IPC IPC(8): F17C7/00F17C13/04
CPCF17C7/00F17C13/04F17C2205/0329F17C2223/036
Inventor 郭海涛
Owner 天合光能(宿迁)光电有限公司
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