Calibration system and calibration method for helium mass spectrometer leak detector
A technology of a helium mass spectrometer leak detector and a calibration system, which is applied in the field of helium mass spectrometer leak detectors, can solve problems such as poor calibration of helium mass spectrometer leak detectors, and achieve the effects of increasing diversity, improving accuracy, and improving efficiency
Active Publication Date: 2022-05-31
安徽诺益科技有限公司
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[0004] The purpose of the present invention is to provide a helium mass spectrometer leak detector calibration system and a calibration method to solve the following technical problems: How to solve the problem of poor calibration of helium mass spectrometer leak detectors in existing solutions
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[0023] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0024] see figure 1 As shown in the figure, the present invention is a calibration system for a helium mass spectrometer leak detector, including an acquisition module, a processing module, a calibration module, a storage module and a prompt module, and the storage module is used to store the calibration results and preset data, including but not Limited to equipment model correlation table, pump model correlation table, wire type cor...
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The invention discloses a calibration system for a helium mass spectrometer leak detector, which belongs to the technical field of helium mass spectrometer leak detectors and includes an acquisition module, a processing module and a calibration module. The acquisition module includes a first acquisition unit, a second acquisition unit and a third acquisition unit. One collection unit is used to collect the electrical information of the helium mass spectrometer leak detector; the second collection unit is used to collect the pumping information of the helium mass spectrometer leak detector; the third collection unit is used to collect the mass spectrum information of the helium mass spectrometer leak detector; the processing module It is used for feature extraction and processing of various data collected to obtain a feature processing set; the calibration module is used for analyzing and calibrating a helium mass spectrometer leak detector according to the feature processing set to obtain a calibration result; the invention also discloses a helium mass spectrometry leak detector. A calibration method for a leak meter calibration system; the invention is used to solve the technical problem that the calibration effect of a helium mass spectrometer leak detector in the existing solution is not good.
Description
technical field [0001] The invention relates to the technical field of helium mass spectrometry leak detectors, in particular to a calibration system and a calibration method for helium mass spectrometry leak detectors. Background technique [0002] The helium mass spectrometer leak detector is a mass spectrometer that uses helium as the leaking gas and uses a gas analyzer to detect helium to achieve leak detection; helium easily passes through the leak and diffuses rapidly; If there is a leak hole on the container under test of the analyzer, the position of the leak hole and the amount of air leakage can be obtained through detection. [0003] When the existing helium mass spectrometer leak detector is in use, only a single detection method is used to detect and calibrate the helium mass spectrometer leak detector. The detection results of the helium mass spectrometer are inaccurate, which makes the calibration of the helium mass spectrometer leak detector ineffective. S...
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IPC IPC(8): G01M3/00G01M3/20
CPCG01M3/007G01M3/202
Inventor 朱操胜
Owner 安徽诺益科技有限公司