Helium mass spectrometer leak detector calibration system and calibration method
A technology for a helium mass spectrometer leak detector and a calibration system, which is applied in the field of helium mass spectrometry leak detectors, can solve the problems of poor calibration of the helium mass spectrometer leak detector, etc., and achieves the effects of improving diversity, accuracy and efficiency.
Active Publication Date: 2021-11-23
安徽诺益科技有限公司
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[0004] The purpose of the present invention is to provide a helium mass spectrometer leak detector calibration system and a calibration method to solve the following technical problems: How to solve the problem of poor calibration of helium mass spectrometer leak detectors in existing solutions
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[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0024] see figure 1 As shown, the present invention is a helium mass spectrometer leak detector calibration system, including an acquisition module, a processing module, a calibration module, a storage module and a prompt module, and the storage module is used to store the calibration results and preset data, including but not Limited to the equipment model association table, pump model association table, wire type association table, electric threshold, pumping thr...
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The invention discloses a helium mass spectrometer leak detector calibration system, and belongs to the technical field of helium mass spectrometer leak detectors, the helium mass spectrometer leak detector calibration system comprises an acquisition module, a processing module and a calibration module, the acquisition module comprises a first acquisition unit, a second acquisition unit and a third acquisition unit, and the first acquisition unit is used for acquiring electrical information of a helium mass spectrometer leak detector; the second acquisition unit is used for acquiring air exhaust information of the helium mass spectrometer leak detector; the third acquisition unit is used for acquiring mass spectrum information of the helium mass spectrum leak detector; the processing module is used for performing feature extraction and processing on the collected data to obtain a feature processing set; and the calibration module is used for analyzing and calibrating the helium mass spectrometer leak detector according to the feature processing set to obtain a calibration result. The invention further discloses a calibration method of the helium mass spectrometer leak detector calibration system. The device and the method are used for solving the technical problem of poor calibration effect of the helium mass spectrometer leak detector in the prior art.
Description
technical field [0001] The invention relates to the technical field of helium mass spectrometer leak detectors, in particular to a calibration system and a calibration method for helium mass spectrometer leak detectors. Background technique [0002] The helium mass spectrometer leak detector is a mass spectrometer that uses helium as the leak detection gas and detects the helium with a gas analyzer; the helium gas easily passes through the leak hole and diffuses rapidly; On the inspected container of the analyzer, if there is a leak on the inspected container, the position of the leak and the size of the leak can be obtained through detection. [0003] When the existing helium mass spectrometer leak detector is in use, only a single detection method is used to detect and calibrate the helium mass spectrometer leak detector, for example, only to detect and analyze the power or voltage and current during operation, resulting in the helium mass spectrometer leak detector The d...
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IPC IPC(8): G01M3/00G01M3/20
CPCG01M3/007G01M3/202
Inventor 朱操胜
Owner 安徽诺益科技有限公司