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Foreline assembly for quad station process module

A technology of front-stage pipeline and processing module, which is applied in the field of front-stage pipeline components configured with four-station processing modules, which can solve the problems of difficult maintenance of the hardware of the lower chamber, difficult maintenance of the hardware of the lower chamber, and hardware difficulties, etc.

Pending Publication Date: 2021-11-30
LAM RES CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The normal configuration of the foreline components can make servicing the lower chamber hardware very difficult
The lower part of some modules is extremely congested, making it difficult to add new hardware
In particular, some underchamber hardware is particularly difficult to maintain due to the pedestal lift direction dictated by the geometry and location of the forestage

Method used

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  • Foreline assembly for quad station process module
  • Foreline assembly for quad station process module
  • Foreline assembly for quad station process module

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Embodiment Construction

[0020] The following description includes systems, methods, techniques, instruction sequences, and computing machine program products that embody illustrative embodiments of the disclosure. In the following description, for purposes of explanation, several specific details are set forth in order to provide a thorough understanding of example embodiments. It will be apparent, however, to one skilled in the art that the present disclosure may be practiced without these specific details.

[0021] Portions of the disclosure of this patent document may contain material that is subject to copyright protection. The copyright owner has no objection to the facsimile reproduction by anyone of the patent document or the patent disclosure as it appears in the Patent and Trademark Office's patent files or records, but otherwise reserves all copyrights. The following notice applies to any data described below and in the drawings that form part of this document: Copyright 2019-2020 Lam Rese...

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Abstract

A foreline assembly for a quad station process module (QSM) is provided. In some examples, a foreline assembly comprises four inlets each connectable to a chamber port of a process module of the QSM and an outlet connectable directly or indirectly to a vacuum source. A first foreline bifurcation is disposed proximate the outlet of the foreline assembly. Two second bifurcations are each disposed between the first foreline bifurcation and a respective pair of the inlets. The first and second bifurcations divide the foreline assembly into three sections. A respective diameter of a foreline in each section increases stepwise at a respective bifurcation in a direction of gas flow from at least one of the inlets to the outlet of the foreline assembly and is constant within a respective section of the foreline assembly.

Description

[0001] priority claim [0002] This application claims priority to U.S. Provisional Patent Application No. 62 / 836,501, filed April 19, 2019, the entire disclosure of which is hereby incorporated by reference. technical field [0003] The present disclosure relates to foreline assemblies and configurations, and more particularly to foreline assemblies configured for quad stop processing modules (QSM) in semiconductor manufacturing applications. Background technique [0004] The foreline assembly is typically connected to a vacuum source beneath the processing chamber or module, and exhaust is evacuated from the chamber during wafer processing. The normal configuration of the foreline components can make servicing the lower chamber hardware very difficult. The lower sections of some modules are extremely congested, making adding new hardware difficult. In particular, some underchamber hardware is particularly difficult to maintain due to the pedestal lift direction dictated ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67
CPCH01L21/6719H01L21/67161H01L21/67184H01L21/67017H01L21/67167H01L21/67196H01L21/67745
Inventor 米格尔·本杰明·瓦斯克斯埃米尔·德拉佩
Owner LAM RES CORP
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