Surface shape detection system and method for high-precision Schmidt correction plate
A Schmidt correction plate and surface shape detection technology, which is applied in the field of optical detection, can solve the problems of low precision of the detection method, long detection cycle, and decline in spherical aberration performance advantages, and achieve simple and easy debugging of the detection optical path, high precision and fast Detect and improve the effect of processing technology
Active Publication Date: 2021-12-03
NANJING INTANE OPTICS ENG
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[0007] The accuracy of the traditional Schmidt correction plate inspection method is not high, and the caliber of the inspection mirror is generally large, the number of optical elements in the detection optical path is large, the detection optical path is complex, there are many degrees of freedom, the detection cycle is long, the inspection is difficult, the accuracy is low, and the operation Complicated, causing the performance advantage of the Schmidt correction plate to correct the spherical aberration of the system to decrease
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[0041] Preferred embodiments of the present invention will be specifically described below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the application and are used together with the embodiments of the present invention to explain the principles of the present invention.
[0042] A surface shape detection system of a high-precision Schmidt correction plate disclosed in this embodiment. like figure 2 and 3 As shown, it includes an interferometer 1, a compensator 2, a Schmidt correction plate 3 to be tested and a standard spherical mirror 4;
[0043] Wherein, the interferometer 1 and the standard spherical reflector 4 with the reflective surface facing the interferometer 1 are located at both ends of the detection optical path; in the optical path, the center of curvature of the standard spherical reflector 4 coincides with the focus of the interferometer 1; the interferometer 1 emits a detection The light irradiates th...
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The invention relates to a surface shape detection system for a high-precision Schmidt correction plate. The surface shape detection system comprises an interferometer, a compensator, a to-be-detected Schmidt correction plate and a standard spherical reflector, wherein the interferometer and the standard spherical reflector of which the reflecting surface faces the interferometer are positioned at two ends of a detection light path; in the detection light path, the curvature center of the standard spherical reflector coincides with a focus of the interferometer; the to-be-detected Schmidt correction plate is positioned on one side, close to the standard spherical reflector, in the detection light path; the compensator is located between the focus of the interferometer in the detection light path and the to-be-detected Schmidt correction plate, and is used for compensating the spherical aberration of the to-be-detected Schmidt correction plate; the interferometer, the compensator, the to-be-detected Schmidt correction plate and the standard spherical reflector are coaxial in the whole detection light path. According to the surface shape detection system, a problem of high-order aspheric surface detection is solved, the processing process of the Schmidt correction plate can be effectively guided, and the processing technology can be improved.
Description
technical field [0001] The invention relates to the technical field of optical detection, in particular to a surface shape detection system and method of a high-precision Schmidt correction plate. Background technique [0002] In order to meet the needs of optical imaging systems for large fields of view, such as large fields of view, low cost, and high-performance astronomical telescope systems, Schmidt correction plates are often added to the system to meet design requirements. The Schmidt correction plate is generally used to correct the spherical aberration produced by the spherical mirror of the reflecting telescope, and is often placed on the path of incoming light at the front of the telescope. [0003] The Schmidt correction mirror is not a quadratic surface, and the mirror is thin (the ratio of diameter to thickness is generally about 1 / 30 to 1 / 40), so it is difficult to process and inspect. [0004] Generally, detection is considered from the processing point of v...
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IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 黎发志杜维佳李民益李文宗陈彧龙刘海东周子元
Owner NANJING INTANE OPTICS ENG