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Pressure control system covering normal pressure to high vacuum

A pressure control and high vacuum technology, applied in the field of environmental simulation, can solve the problems of difficult to cover the pressure range, difficult to ensure the accuracy and stability of pressure control, etc., to achieve the effect of easy control, high pressure control accuracy, and easy manipulation

Active Publication Date: 2021-12-03
BEIJING INST OF SPACECRAFT ENVIRONMENT ENG
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  • Abstract
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Problems solved by technology

Because the pressure change involves the change of the flow state, the conventional pressure control method adopts high-frequency valve on-off and other methods to control the pressure, which can realize low vacuum and medium vacuum stage pumping, but it is difficult to cover the pressure range from atmospheric pressure to high vacuum , and it is difficult to ensure the accuracy and stability of pressure control, the present invention proposes a pressure control system that can cover various pressure points from normal pressure to high vacuum

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  • Pressure control system covering normal pressure to high vacuum
  • Pressure control system covering normal pressure to high vacuum
  • Pressure control system covering normal pressure to high vacuum

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Embodiment Construction

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0031] see figure 1 , the present invention provides a technical solution:

[0032] A pressure control system covering normal pressure to high vacuum, including a vacuum container 1, the vacuum container 1 is equipped with a vacuum gauge 7, a mass flow meter 8, and the mass flow meter 8 adopts PID control, and the pumping speed of the vacuum pump is selected according to different pressures Mass flowmeters with a range of 8 are connected in parallel. The selection...

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Abstract

The invention discloses a pressure control system covering normal pressure to high vacuum. The system comprises a vacuum container, the vacuum container is provided with a vacuum gauge, a mass flow meter, a first vacuum valve and a second vacuum valve, wherein the first vacuum valve is connected with a roughing pumping pipeline, the roughing pumping pipeline is connected with a roughing pumping pump through an opening adjusting valve, the second vacuum valve is connected with a high vacuum pump, and the roughing pump can serve as a backing pump of the high vacuum pump at the same time. According to the invention, the pressure control range is from normal pressure to 1*10<-5> Pa, and the pressure control system can be stabilized at any pressure, so that the device is convenient for a worker to operate and control, the pressure control precision is high, errors can be effectively reduced, the pumping rate is adjustable by using the roughing pump, and the air supply adjustment is performed by using the mass flow meter, so that the pressure control system is convenient to control.

Description

technical field [0001] The invention relates to the technical field of environment simulation, in particular to a pressure control system covering normal pressure to high vacuum. Background technique [0002] In order to study the influence of high-altitude environment on various equipment, it is necessary to realize high-quality simulation of high-altitude environment. The most notable feature of the high-altitude environment is the change of ambient pressure. As the altitude increases, the pressure gradually decreases from atmospheric pressure to vacuum environment. Therefore, it is necessary to stabilize the test pressure at any pressure point from atmospheric pressure to high vacuum. Because the pressure change involves the change of the flow state, the conventional pressure control method adopts high-frequency valve on-off and other methods to control the pressure, which can realize low vacuum and medium vacuum stage pumping, but it is difficult to cover the pressure r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05D16/20
CPCG05D16/2066
Inventor 白冰龚洁詹海洋顾志飞王宇韩潇王学章张燚何超
Owner BEIJING INST OF SPACECRAFT ENVIRONMENT ENG
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