Air cylinder pressing arm type plate loading and unloading device of photoetching machine
A technology of lithography machine and pressing arm, which is applied in the field of lithography machine, can solve problems such as unstable fixing, low speed of upper and lower plates, and influence on plate-making efficiency, and achieve high plate-making efficiency, lifting speed, and good stability
Pending Publication Date: 2022-01-07
湖南印之明智能制造有限公司
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Problems solved by technology
However, in the production process of the fully automatic photolithography machine in the prior art, there are problems such as unstable fixing between the substrate plate and the drum surface of the vacuum adsorption drum, and low speed of the upper and lower plates, which affects the efficiency of plate making
Method used
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Embodiment Construction
[0018] Embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
[0019] figure 1 It is a schematic diagram of an embodiment of the cylinder pressing arm type upper and lower plate device of the lithography machine of the present invention, figure 2 It is a cross-sectional view of an embodiment of the cylinder pressing arm type upper and lower plate device of the lithography machine of the present invention, image 3 It is a schematic diagram of an embodiment of the first plate clamping arm in the cylinder pressing arm type upper and lower plate device of the lithography machine of the present invention, Figure 4 It is a schematic diagram of an embodiment of the pressure plate roller pressing arm in the cylinder pressing arm type upper and lower plate device of the lithography machine of the present invention. As shown in the figure, a cylinder pressing arm type upper and lower plate device of a lithography machine ...
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The invention discloses an air cylinder pressing arm type plate loading and unloading device of a photoetching machine. The device comprises a plate loading platform and an air cylinder pressing arm plate loading and unloading mechanism which are positioned on a rack; the plate loading platform is positioned on one side of the air cylinder pressing arm plate loading and unloading mechanism; the air cylinder pressing arm plate feeding and discharging mechanism comprises a vacuum adsorption drum, a tail plate clamping and pressing arm, a pressing plate roller pressing arm, a head plate clamping and pressing arm and a plate discharging clamping and pressing arm, wherein the tail plate clamping and pressing arm, the pressing plate roller pressing arm and the head plate clamping and pressing arm are arranged above the vacuum adsorption drum, and the plate discharging clamping and pressing arm is located on the side, away from the plate loading platform, of the vacuum adsorption drum; and the two ends of the vacuum adsorption drum are fixed to two side plates of the rack through bearings respectively, one end of the vacuum adsorption drum is connected with a first motor, a dovetail groove is formed in the drum face of the vacuum adsorption drum, a fixed plate clamp and a movable plate clamp are arranged on the dovetail groove, and the movable plate clamp is movably connected with the dovetail groove through a sliding block. The air cylinder pressing arm type plate loading and unloading device of the photoetching machine, which adopts the structure, is good in stability, improves the plate loading and unloading speed and is high in plate making efficiency.
Description
technical field [0001] The invention relates to the technical field of lithography machines, in particular to a cylinder pressing arm type upper and lower plate device of a lithography machine. Background technique [0002] Lithography machines are generally divided into three types according to the simplicity of operation: manual, semi-automatic and fully automatic. Among them, fully automatic means that from the upper and lower plates of the substrate to the exposure time and cycle are all controlled by the program. This production method can meet the requirements of the factory. processing needs. However, in the production process of the fully automatic photolithography machine in the prior art, there are problems such as unstable fixing between the substrate plate and the drum surface of the vacuum adsorption drum, and low speed of the upper and lower plates, which affects the efficiency of plate making. Contents of the invention [0003] The object of the present inv...
Claims
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IPC IPC(8): G03F7/20
CPCG03F7/70841G03F7/707Y02P70/50
Inventor 王泽明邓超略陈蓬柱
Owner 湖南印之明智能制造有限公司