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Variable inductor device

A technology of inductors and equipment, applied in the field of tuned impedance matching network, can solve problems such as low-frequency signal blocking, complicated circuit configuration, and DC blocking

Pending Publication Date: 2022-01-11
LAM RES CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This configuration requires additional circuit components compared to a separate variable inductor
Also, this configuration results in direct current (DC) blocking due to the presence of the series capacitor; therefore, low frequency signals will be blocked by the capacitor
If low-frequency signals are to pass through the circuit, additional circuit elements are required, which significantly complicates the circuit configuration

Method used

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  • Variable inductor device
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Examples

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Embodiment Construction

[0045] The description that follows includes systems, methods, techniques, instruction sequences, and computing machine program products that implement illustrative embodiments of the disclosure. In the ensuing description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the example embodiments. It will be apparent, however, to one skilled in the art that the present disclosure may be practiced without these specific details.

[0046] Portions of the disclosure of this patent document may contain material that is subject to copyright protection. The copyright owner has no objection to the facsimile reproduction by anyone of the patent document or the patent disclosure as it appears in the Patent and Trademark Office patent files or records, but otherwise reserves all copyright rights. The following statement applies to any data described below and in the drawings that form part of this document: Copyright Lam ...

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Abstract

In some examples, a variable inductor device includes a first planar loop comprising a first planar face and a material that supports electromagnetic coupling; and a second planar loop comprising a second planar face and a material that supports electromagnetic coupling. The first planar loop is separable from the second planar loop to vary the inductance of the variable inductance device. In some examples, the first and second planar faces overlap each other in a closed configuration of the device.

Description

[0001] priority claim [0002] This application claims the benefit of priority of U.S. Patent Serial No. 62 / 858,568, filed July 7, 2019, the entire disclosure of which is hereby incorporated by reference. technical field [0003] The present disclosure relates to variable inductor devices and, in some examples, to systems and methods for tuning impedance matching networks in semiconductor fabrication. Some examples also relate to micromechanical or printed circuit board (PCB) applications and circuits used therewith. Background technique [0004] Inductors and variable inductors can be useful circuit elements in a variety of important applications and products. For example, inductors and variable inductors are building blocks of many RF wireless products. Among other applications, they are used to match and load RF source systems in semiconductor manufacturing operations. For example, plasma systems used in semiconductor processing typically include one or more multiple r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01P7/08H01P9/00H01P3/00
CPCH01P7/088H01P9/00H01P3/00H01J37/32183H01F29/12H01F29/02
Inventor 大卫·迈克尔·弗伦奇
Owner LAM RES CORP