Processing detection system and manufacturing method of off-axis aspheric element

An off-axis aspheric surface and detection system technology is applied in the field of processing and testing systems for off-axis aspheric components, and can solve problems affecting the processing and detection efficiency of large-diameter off-axis aspheric components, affecting off-axis parameter control accuracy and detection efficiency, and non- Due to the large weight of spherical components, the effect of reducing the time of repeated clamping and alignment, improving the processing accuracy and processing efficiency, and improving the clamping efficiency

Pending Publication Date: 2022-01-14
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] 1. The large-diameter off-axis aspheric components in the prior art are heavy, and repeated clamping between processing equipment and testing equipment consumes a lot of time, has low efficiency and has handling risks, etc.;
[0006] 2. The large-diameter off-axis aspheric element in the prior art is difficult to clamp and align on the processing equipment and testing equipment, which affects the processing and testing efficiency of the large-diameter off-axis aspheric element;
[0007] 3. The off-axis parameters need to be accurately monitored and corrected during the processing of large-diameter off-axis aspheric components in the prior art. If the off-axis parameters are adjusted offline after each processing, the off-axis parameter control accuracy and detection efficiency will be affected.

Method used

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  • Processing detection system and manufacturing method of off-axis aspheric element
  • Processing detection system and manufacturing method of off-axis aspheric element
  • Processing detection system and manufacturing method of off-axis aspheric element

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Embodiment 1

[0050] Such as figure 1 , figure 2 As shown, Embodiment 1 of the present invention provides a processing and detection system for off-axis aspheric components, including a turning device 100, a processing device 200 and a detection device 300:

[0051] The inversion device 100 is located between the processing device 200 and the detection device 300, and the inversion axis of the inversion device 100 intersects the output optical path of the detection device 300;

[0052] The turning device 100 includes a driving mechanism 110 and a supporting mechanism 120 , and the driving mechanism 110 is connected with the supporting mechanism 120 .

[0053] By setting the turning device 100 between the processing device 200 and the detection device 300, and realizing the support of the off-axis aspheric element 500 through the support mechanism 120 on the turning device 100, the off-axis aspheric element 500 is supported through the driving mechanism 110 on the turning device 100. The ...

Embodiment 2

[0073] Embodiment 2 of the present invention provides a method for manufacturing an off-axis aspheric element, including the following steps:

[0074] Step S10: setting up the processing and detection system of the off-axis aspheric element, processing the off-axis aspheric element 500, and detecting the off-axis aspheric element 500;

[0075] Step S20: If the surface shape error of the off-axis aspheric element 500 is not less than the preset error threshold, control the support mechanism 120 to be at the processing position through the driving mechanism 110, and continue to step S10; if the surface shape error of the off-axis aspheric element 500 is If the error is smaller than the preset error threshold, the desired off-axis aspheric element is obtained.

[0076] By judging whether the surface shape error of the off-axis aspheric element 500 is less than the preset error threshold, it is determined whether to continue processing and testing until the surface shape error of ...

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Abstract

The invention is applicable to the technical field of advanced optical manufacturing, and provides a processing detection system and a manufacturing method of an off-axis aspheric element. The processing detection system comprises a turnover device, a processing device and a detection device. The turnover device is located between the processing device and the detection device, and the turnover axis of the turnover device and the output light path of the detection device are arranged in a crossed manner. The turnover device comprises a driving mechanism and a supporting mechanism, and the driving mechanism is connected with the supporting mechanism. According to the processing detection system and the manufacturing method of the off-axis aspheric element provided by the invention, the integration of processing and detection is realized, and the processing detection system and the manufacturing method have the advantages of time loss avoidance, high processing precision and high efficiency.

Description

technical field [0001] The invention relates to the field of advanced optical manufacturing technology, in particular to a processing and detection system and a manufacturing method of an off-axis aspheric element. Background technique [0002] Large-aperture off-axis aspheric components are key components of high-power laser devices. This type of component has the advantages of no central obstruction, improved image quality, and simplified system structure. It is used as an important component in the optical diagnostic system of ultra-high-power laser devices. To achieve accurate sampling of the laser beam, the precision of the processed surface will directly affect the sampling and evaluation of the beam. Due to the special geometric shape of the large-diameter off-axis aspheric element, its processing difficulty and manufacturing cost are much higher than that of the coaxial aspheric element. [0003] Ultra-precision manufacturing and testing technology is an important c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
CPCG01M11/0214G01M11/0271
Inventor 钟波许乔李洁邓文辉李海波王健
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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