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Temperature compensation method and device of micromechanical gyroscope

A technology of micromechanical gyroscope and temperature compensation, which is applied in the direction of speed measurement by gyro effect, gyroscope/steering sensing equipment, measuring device, etc. effect of error

Active Publication Date: 2022-02-08
东方空间技术(山东)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The embodiment of the present invention provides a temperature compensation method and device for a micromachined gyroscope, to at least solve the problems caused by microcomputer gyroscopes in the related art due to production process factors. The zero bias value of the gyroscope tends to change greatly with temperature changes, which easily causes technical problems of large measurement errors

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  • Temperature compensation method and device of micromechanical gyroscope
  • Temperature compensation method and device of micromechanical gyroscope
  • Temperature compensation method and device of micromechanical gyroscope

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Embodiment 1

[0028] According to an embodiment of the present invention, a method embodiment of a temperature compensation method for a micromechanical gyroscope is provided. It should be noted that the steps shown in the flow chart of the accompanying drawings can be implemented in a computer system such as a set of computer-executable instructions and, although a logical order is shown in the flowcharts, in some cases the steps shown or described may be performed in an order different from that shown or described herein.

[0029] figure 1 is a flow chart of a temperature compensation method for a micromachined gyroscope according to an embodiment of the present invention, such as figure 1 As shown, the temperature compensation method of the micromachined gyroscope includes the following steps:

[0030] Step S102 , supplying power to the MEMS gyroscope through a reference voltage chip, wherein the reference voltage chip is set in a peripheral circuit of the MEMS gyroscope.

[0031] Sinc...

Embodiment 2

[0052] According to another aspect of the embodiments of the present invention, a temperature compensation device for a micromechanical gyroscope is also provided, Figure 4 is a schematic diagram of a temperature compensation device for a micromachined gyroscope according to an embodiment of the present invention, such as Figure 4 As shown, the temperature compensation device of the micromachined gyroscope may include: a power supply unit 41 , an acquisition unit 43 and a temperature compensation unit 45 . The temperature compensation device of the micromachined gyroscope will be described below.

[0053] The power supply unit 41 is used to supply power to the MEMS gyroscope through a reference voltage chip, wherein the reference voltage chip is set in the peripheral circuit of the MEMS gyroscope.

[0054] The acquisition unit 43 is configured to acquire the output data of the MEMS gyroscope through the signal acquisition circuit, and transmit the output data to the data pr...

Embodiment 3

[0064] According to another aspect of the embodiments of the present invention, a computer-readable storage medium is also provided, and the computer-readable storage medium includes a stored computer program, wherein when the computer program is run by a processor, the device where the computer storage medium is located is controlled to execute the above-mentioned A temperature compensation method for any one of the micromachined gyroscopes.

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Abstract

The invention discloses a temperature compensation method and device for a micromechanical gyroscope. The method comprises the following steps: supplying power to an MEMS (Micro Electro Mechanical System) gyroscope through a reference voltage chip, wherein the reference voltage chip is arranged in a peripheral circuit of the MEMS gyroscope; acquiring output data of the MEMS gyroscope through a signal acquisition circuit, and transmitting the output data to a data processing circuit, wherein the output data comprise a temperature value of the MEMS gyroscope; and performing temperature compensation on the output data by using a data processing circuit and the temperature correction curve to obtain a compensated angular velocity value. According to the invention, the technical problem that the zero offset value of the microcomputer gyroscope is easy to change greatly along with the temperature change due to the production process factors in the prior art, so that a large measurement error is easy to cause is solved.

Description

technical field [0001] The present invention relates to the technical field of temperature error compensation of micromechanical gyroscopes, in particular to a temperature compensation method and device for micromechanical gyroscopes. Background technique [0002] Micro-mechanical gyroscopes (Micro Electro Mechanical Systems, referred to as MEMS), that is, micro-electro-mechanical systems, are small in size, light in weight, good in shock resistance, and low in power consumption. However, due to factors such as production technology, the zero bias value of MEMS gyroscopes changes greatly with temperature changes, and the trend of changes with temperature changes is random, resulting in large measurement errors. [0003] Aiming at the problem that the microcomputer gyroscope in the above-mentioned related technologies is prone to large changes in zero bias value with temperature changes due to production process factors, which easily causes large measurement errors, no effect...

Claims

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Application Information

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IPC IPC(8): G01C19/00G01C25/00
CPCG01C19/00G01C25/00Y02D10/00
Inventor 马旭布向伟于继超魏凯
Owner 东方空间技术(山东)有限公司