Precise mask plate and mask plate

A precision mask and mask technology, which is applied in the field of evaporation equipment, can solve the problems of precision mask wrinkles, affecting product yield, etc., to reduce the probability of wrinkles, well shield organic materials, and support small differences in strength Effect

Pending Publication Date: 2022-02-11
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Summary
  • Abstract
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Problems solved by technology

[0002] Now, in the preparation of OLED (Organic Light-Emitting Diode, organic electroluminescent diode) display panel, the evaporation process is used t

Method used

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  • Precise mask plate and mask plate
  • Precise mask plate and mask plate
  • Precise mask plate and mask plate

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Embodiment Construction

[0025] Features and exemplary embodiments of various aspects of the invention will be described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is only to provide a better understanding of the present invention by showing examples of the present invention.

[0026] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is a relationship between these entities or operations. There is no such actual relationship or order between them. Furthermore, the term "comprises", "comprises" or any other variation thereof is i...

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PUM

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Abstract

The invention discloses a precise mask plate and a mask plate. The precise mask plate comprises a mask plate body which comprises at least one evaporation area, a shielding area at least partially surrounding the evaporation area and an edge area surrounding the evaporation area and the shielding area, wherein the evaporation area comprises a plurality of precise evaporation holes, the edge area comprises a plurality of edge area openings, and the shielding area comprises a plurality of grooves. According to the precise mask plate provided by the invention, due to the fact that the supporting strength difference of the shielding area, the edge area and the evaporation areas is small, the stress difference borne by all the areas can be reduced in the net stretching process of the precise mask plate, the probability that the precise mask plate is wrinkled after net stretching is reduced, and the product yield is improved.

Description

technical field [0001] The invention belongs to the technical field of vapor deposition equipment, and in particular relates to a precision mask plate and a mask plate. Background technique [0002] Now, in the preparation of OLED (Organic Light-Emitting Diode, organic electroluminescent diode) display panel, the evaporation process is used to form the light-emitting material layer. During the evaporation process, a precision mask is required. There is a wrinkle problem, which affects the product yield. Contents of the invention [0003] Embodiments of the present invention provide a precision mask and a mask. The precision mask provided in the present application has a greatly reduced probability of wrinkles after stretching, which improves product yield. [0004] In one aspect, an embodiment of the present invention provides a precision mask, including a mask body, the mask body includes at least one evaporation region, a shielding region at least partially surrounding ...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24H01L51/56
CPCC23C14/042C23C14/24H10K71/166H10K71/00
Inventor 邱岳王子豪李伟丽韩冰李文星
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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