Automatic focusing device for linear scanning automatic optical detection system

Abstract

The invention relates to an automatic focusing device for a linear scanning automatic optical detection system, and the device comprises an optical detection equipment fixing module which is used for fixing optical detection equipment; the wafer lifting bearing module is used for bearing a wafer and driving the wafer to move, and the wafer lifting bearing module is located below the optical detection equipment; and the distance detection module is arranged in the automatic focusing device and can detect the position of the spacing distance between the wafer and the optical detection equipment, and the distance detection module is connected with the wafer lifting bearing module. According to the automatic focusing device, focusing is achieved by fixing the optical detection equipment and adjusting the position of the wafer through the wafer lifting and bearing module, the wafer can be better shot, the setting time is effectively shortened, the optical detection equipment can complete focusing more quickly, and due to the fact that the overall structure of the wafer is light, the wafer is convenient to adjust. And large inertia cannot be generated in the vertical direction, so that the requirement on the torsion of the brake motor is reduced.

Description

technical field [0001] The invention relates to the technical field of chip manufacturing, in particular to an automatic focusing device for a line scanning automatic optical detection system. Background technique [0002] In the process of chip production and manufacturing, it is necessary to use Line Scan AOI to inspect the wafer to determine whether there are defects or defects on the wafer. In order to be able to shoot and capture the picture of the wafer more clearly, It is often necessary to set an autofocus device in the online scanning automatic optical inspection system for focusing. [0003] In the prior art, the wafer is generally placed on a fixed wafer fixing device 11, and then the optical detection device 2 is placed on a lifting device that can drive the optical detection device up and down. The lifting device includes a gantry 12 and a lifting part 13 , the lifting part 13 on the gantry 12 drives the optical detection device 2 to move up and down to achieve...

AI Technical Summary

Problems solved by technology

[0004] Due to the heavy weight of the optical detection device 2 itself, when the lifting part 13 drives the optical detection device 2 to move up and down, the settling time is long, and it takes a long time to stabilize, resulting in the optical detection device 2 often being out of focus

At the same time, in the process of driving the optical detection device 2 to move, it will cause the optical detection device 2 to vibrate, causing it to have a large inertia in the vertical direction, thus requiring a relatively large torque for the brake motor

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