Method, device and equipment for detecting coaxiality of single crystal furnace and computer storage medium

Abstract

The embodiment of the invention discloses a method, device and equipment for detecting the coaxiality of a single crystal furnace and a computer storage medium. The method comprises the following steps: capturing a first inter-pixel distance between scale marks in the circumferential direction of a centering disc from a centering disc image acquired by a CCD (Charge Coupled Device) camera; based on the first inter-pixel distance and the actual distance between the corresponding scale marks in the circumferential direction of the centering disc, determining the corresponding relation between the actual distance and the first inter-pixel distance; acquiring a second inter-pixel distance between the first pixel center of the centering disc and a second pixel center corresponding to a light spot irradiated to the centering disc by a laser beam; and determining a second actual distance between the center of the heavy hammer and the center of the furnace body based on the distance between the second pixels and the corresponding relation.

Description

technical field [0001] Embodiments of the present invention relate to the field of semiconductor technology, and in particular to a method, device, equipment and computer storage medium for detecting the coaxiality of a single crystal furnace. Background technique [0002] Before the actual production of the single crystal furnace, a series of debugging needs to be carried out on the single crystal furnace. According to the requirements of the crystal pulling process, the upper and lower transmission must be aligned during debugging to ensure that the coaxiality between the seed crystal axis and the crucible axis is low. at a standard value. At present, the naked eye estimation method is used for debugging and alignment, that is, after the weight is hung on the seed crystal rope, the weight is lowered to the place where the seeding position is approximately in contact with the graphite tray, and people evaluate from the external observation window. In this method, due to th...

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Problems solved by technology

[0003] In view of this, the embodiment of the present invention expects to provide a method, device, equipment, and computer storage medium for detecting the coaxiality of a single crystal furnace; it can solve the problems of poor accuracy and difficulty in existing methods for detecting the coaxiality of a single crystal furnace. Observation problems, improve the quality of monocrystalline silicon rods

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