Strain measurement circuit

Abstract

A strain measurement circuit (10) includes at least a first delay chain (110) of a plurality of delay elements (110a,..., 110n) and at least a second delay chain (210) of a plurality of delay elements (210a,..., 210n) arranged on a substrate (30). Each delay element (110a,..., 110n; 110n) of the at least one first and second delay chain (110, 210) is provided with at least one delay element (110a,..., 110n; 220a,..., 220n) depends on the strain applied to the substrate (30). The delay elements (110a,..., 110n) of the at least one first delay chain (110) have a different orientation than the delay elements (210a,..., 210n) of the at least one second delay chain (210). The circuit (10) further comprises processing circuitry (900) for determining a magnitude of strain exerted on the substrate (30) as a function of the first signal propagation delay time of the first delay chain (110) and the second delay chain (210).

Description

[0001] This patent application claims priority from European Patent Application 19191055.3, the disclosure of which is incorporated into this application by reference. technical field [0002] The present disclosure relates to a circuit for measuring strain caused by mechanical deformation of a substrate. Background technique [0003] The electronic properties of substrates on which electronic circuits are disposed or embedded, such as silicon substrates, are highly sensitive to mechanical deformations caused by strain and stress. Strain often induces parasitic effects, which degrade the performance of the electronic circuit on the substrate in terms of temperature drift, accuracy, resolution, or other parameters of the electronic circuit. Often neither the magnitude of the strain nor the direction of maximum strain is available. [0004] Strain is primarily measured with strain gauges connected to an analog-to-digital converter. Typically, strain gauge foils must be glued...

AI Technical Summary

Problems solved by technology

A typical problem is that the strain deformation of the entire substrate affects the resolution, accuracy or temperature drift of the electronic devices arranged on the substrate

Images