Plasma parameter calibration method

Abstract

The invention relates to a plasma parameter calibration method, which comprises the following steps of: a, constructing a highest measurement standard of plasma parameter measurement traceability, and tracing the highest measurement standard to an electrical and optical standard device; b, calibrating the plasma measurement device by using the highest measurement standard to realize calibration traceability of the plasma measurement device; and c, calibrating the secondary height measurement standard by using the highest measurement standard, and performing field calibration on the plasma generator by using the calibrated secondary height measurement standard. Therefore, the calibration traceability of the plasma measuring device and the traceability of the plasma generator can be realized, and the method provided by the invention ensures that the magnitude of the plasma parameter is accurate.

Description

technical field [0001] The invention relates to a plasma parameter calibration method. Background technique [0002] As plasma generators in a vacuum environment are widely used in the fields of national defense science and technology industries such as micro-nano-satellite micro-electromechanical systems (MEMS) etching processing, space plasma environment simulation tests, and plasma electric propulsion, the development of the above-mentioned model tasks , production, and testing all require accurate measurement and control of plasma parameters. And in the process of spacecraft development, with the continuous improvement of the resolution and precision of satellite instruments, each component is more sensitive to pollution. The research on the plasma plume problem of the electric propulsion system is also indispensable for the design of the aircraft. Especially in the case of a large number of applications of spacecraft electric propulsion systems, the measurement of plas...

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Problems solved by technology

It can be seen that in the actual measurement process, it is usually verified by comparing two or more different principle measurement methods such as probe and spectrum or probe and microwave, but no related research has been carried out for the plasma generator in a vacuum environment. Calibration Technology Research

Moreover, there is no technology that proposes to conduct quantitative traceability and standardization research on the measurement process of plasma parameters, so the quantitative accuracy of plasma characteristic parameters cannot be guaranteed and scientifically traced

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