Probe for increasing MEMS-OCT scanning imaging field angle

A technology of scanning imaging and field of view, applied in the field of medical machinery, can solve the problem of small scanning field of view of MEMS-OCT probe, and achieve the effect of improving the scanning field of view

Pending Publication Date: 2022-03-29
WUXI WIO TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The technical problem solved by the present invention is the technical problem that the scanning field of view of the existing MEMS-OCT probe is small

Method used

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  • Probe for increasing MEMS-OCT scanning imaging field angle
  • Probe for increasing MEMS-OCT scanning imaging field angle
  • Probe for increasing MEMS-OCT scanning imaging field angle

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] Such as Figure 1-Figure 4 As shown, a forward-scanning probe that increases the field of view of MEMS-OCT scanning imaging includes an optical fiber 1, a lens 2, a reflective device 3, a MEMS micromirror 4, a first optical window 5-1, and a sealed chamber 6. The cavity 6 is filled with a liquid substance 7, the MEMS micromirror 4 is immersed in the liquid substance 7, the light emitted from the optical fiber 1 passes through the lens 2, the reflective device 3, and the MEMS micromirror 4 in turn, and reaches the first optical window 5- through the liquid substance 7. 1 is shot after refraction.

[0038] Among them, the MEMS micromirror 4 is driven by electrothermal, and its driving method refers to the patent (CN201210363551.5), and the reflective device 3 is a reflector. Liquid substance 7 is a liquid or a mixture of liquid and nanomaterials. The liquid can be one of glycerin (1.4730), mineral oil (1.467), olive oil (1.4763), methyl silicone oil (1.410), indene (1.57...

Embodiment 2

[0054] Such as Figure 5-Figure 8 As shown, a side-scan probe that increases the field of view of MEMS-OCT scanning imaging includes an optical fiber 1, a lens 2, a MEMS micromirror 4, a second optical window 5-2, and a sealed chamber 6. In the sealed chamber 6, Filled with a liquid substance 7, the MEMS micromirror 4 is immersed in the liquid substance 7, the light emitted from the optical fiber 1 passes through the lens 2 and the MEMS micromirror 4 in sequence, and reaches the second optical window 5-2 after being refracted by the liquid substance 7 and then emitted.

[0055] Wherein, the closed chamber 6 is surrounded by the MEMS package body 8 , the side wall and the front end of the side scan probe, and the second optical window 5 - 2 . The optical fiber 1 passes through the MEMS package 8 .

[0056] The specific principle is: the probe is a sealed tube shell filled with a liquid or a mixture of liquid and nanomaterials. The light beam emitted by the optical fiber 1 ent...

Embodiment 3

[0070] Such as Figure 9 , Figure 10 As shown, as a modification of Embodiment 2, the liquid substance 7 in the airtight chamber 6 does not fill the entire chamber, which has the effect of: while increasing the probe field of view, reducing the light passing through the liquid The path length, thereby reducing the absorption of light by the liquid.

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Abstract

A front scanning probe capable of increasing an MEMS-OCT scanning imaging field angle comprises an optical fiber 1, a lens 2, a reflecting device 3, an MEMS micromirror 4, a first optical window 5-1 and a closed cavity 6, the closed cavity 6 is filled with a liquid substance 7, the MEMS micromirror 4 is immersed in the liquid substance 7, light emitted by the optical fiber 1 sequentially passes through the lens 2, the reflecting device 3 and the MEMS micromirror 4, and the first optical window 5-1 is formed in the closed cavity 6. And the light reaches the first optical window 5-1 through the liquid substance 7 to be refracted and then is emitted out. The MEMS micro-mirror has the advantages that through the refraction effect of the liquid, the scanning view field of the MEMS probe is improved, and meanwhile the MEMS micro-mirror is protected through the damping effect of the liquid.

Description

technical field [0001] The invention relates to a probe for increasing the viewing angle of MEMS-OCT scanning imaging, which belongs to the field of medical machinery. Background technique [0002] Optical coherence tomography (Optical Coherence Tomography, OCT) is an emerging medical imaging technology in recent years. It has the advantages of non-invasive, non-invasive and high-resolution, and has been widely used in the diagnosis of ophthalmology, skin and other in vitro diseases. . In order to realize tissue imaging in vivo, the prior art (CN103040428B) has disclosed a miniaturized OCT endoscopic scanning probe (outer diameter ≤ 5mm) that combines micro-electromechanical systems (MEMS) and optical coherence tomography technology, realizing OCT in Non-invasive detection of various internal organs or internal tissues in the human body. However, the existing MEMS-OCT is limited by the overall size of the probe, and the scanning range of the MEMS micromirror is relatively ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61B5/00
CPCA61B5/0066A61B5/0073
Inventor 安妍谢会开赵晖
Owner WUXI WIO TECH
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