A device and method for measuring the overall three-dimensional profile of the inner surface of a concave workpiece

A technology of three-dimensional profile and measuring device, which is applied in the field of profile measurement, can solve problems such as complex system structure and insufficient adaptability of a single probe angle, and achieve the effect of avoiding speckle phenomenon

Active Publication Date: 2022-06-03
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Abstract
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  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a device and method for measuring the overall three-dimensional profile of the inner surface of a concave workpiece, which effectively solves the problems of insufficient adaptability of the original single probe angle and complex system structure.

Method used

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  • A device and method for measuring the overall three-dimensional profile of the inner surface of a concave workpiece
  • A device and method for measuring the overall three-dimensional profile of the inner surface of a concave workpiece
  • A device and method for measuring the overall three-dimensional profile of the inner surface of a concave workpiece

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Embodiment 1

[0041] A device for measuring the overall three-dimensional contour of the inner surface of a concave workpiece, such as figure 1 shown, including:

[0042] The light generation module is used to generate ring light and collimated light at the same time, and the transmission direction of the ring light is perpendicular to the central axis of symmetry of the tested sample 11, and the transmission direction of the collimated light is parallel to the central axis of symmetry of the tested sample 11 . With this arrangement, the central axis of the light generating module (which is also the center of the ring light) and the symmetrical central axis of the sample 11 to be tested can only be parallel but not coaxial, that is, the circular error caused by the off-axis of the ring light will not be caused (from a perfect circle to an ellipse), avoiding the problem of adding a coaxial adjustment mechanism to the system when the annular light is obliquely incident (when the angle betwee...

Embodiment 2

[0064] The present embodiment provides a method for measuring the overall three-dimensional contour of the inner surface of a concave workpiece, which is applied to the device for measuring the overall three-dimensional contour of the inner surface of a concave workpiece as provided in Embodiment 1, including the following steps:

[0065] obtain the first reflected light set;

[0066] obtain the second reflected light set;

[0067] Obtain the profile of the side surface of the concave space according to the first reflected light set and the annular light section method;

[0068] Obtain the contour of the inner bottom surface according to the second reflected light set and the laser triangulation method.

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Abstract

The invention discloses a device and method for measuring the overall three-dimensional profile of the inner surface of a concave workpiece. The central axis of symmetry, the transmission direction of the collimated light is parallel to the central axis of symmetry of the tested sample; the first reflected light detection module for receiving the first reflected light and generating the first object image; for receiving the second reflected light A second reflected light detection module that emits light and generates a second object image, and a control processing module for obtaining the side profile of the concave space according to the first reflected light set and the inner bottom surface profile according to the second reflected light set. The purpose of the present invention is to provide a device and method for measuring the overall three-dimensional profile of the inner surface of a concave workpiece, which effectively solves the problems of insufficient angle adaptability of various single probes and complex system structure.

Description

technical field [0001] The invention relates to the technical field of contour measurement, in particular to a device and method for measuring the overall three-dimensional contour of the inner surface of a concave workpiece. Background technique [0002] With the continuous progress of precision machining technology, the surface processing quality of samples of various shapes is continuously improved, and higher and higher requirements are also placed on the surface contour detection technology. Profile measurement methods can be divided into two categories: contact and non-contact. Among them, non-contact measurement is favored due to its non-destructive properties on the surface of the sample to be measured, including interferometry, laser triangulation, and confocal methods. Among them, the interferometric method has extremely high measurement accuracy, but the system structure is complex and has very high requirements for environmental stability; the confocal method an...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
Inventor 马骅张霖柴立群白金玺任寰石振东马可刘丽佳
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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