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7results about How to "Avoid inaccurate measurements" patented technology

Gap detection system, method and method for focal plane correction

ActiveCN115981109BAchieve nanometer precision detectionavoid inaccurate measurementsPhotomechanical exposure apparatusMicrolithography exposure apparatus
The disclosure provides a gap detection system for detecting global gap data between a template and a substrate, comprising: a support frame; a template holder comprising a focus detection module for monitoring gap data between the template and the substrate in real time; a workpiece table module comprising a piece supporting table for adjusting the position and attitude of the substrate; an upright surface shape detection module for detecting the substrate to obtain first surface shape data; a folded surface shape detection module capable of switching positions between a detection position and an avoidance position for detecting the template to obtain second surface shape data; and a control system for acquiring position data of the template and the substrate and calibration data of the upright surface shape detection module and the folded surface shape detection module, and for calculating global gap data between the template and the substrate by combining the position data, the calibration data, the first surface shape data and the second surface shape data after acquiring the inclination angle between the template and the substrate.
Owner:INST OF OPTICS & ELECTRONICS CHINESE ACAD OF SCI

A planar vector propulsion system test bed for an underwater unmanned vehicle

The utility model discloses a kind of plane vector propulsion system test bench for underwater unmanned vehicle, including main stand, lifting rod, fixed auxiliary plate, circular rotary support plate, underwater robot propulsion system, U-shaped rotating frame, propeller, bearing tensile and compressive force sensor, symmetrical rotary tensile and compressive force sensor, end face disc type torsional tensile and compressive force sensor, side face disc type torsional tensile and compressive force sensor, lifting rod connects main stand and bearing tensile and compressive force sensor, fixed auxiliary plate and circular rotary support plate are sequentially connected below the sensor, U-shaped rotating frame is used to fix propulsion system and part sensor, end face disc type torsional tensile and compressive force sensor passes through the through-hole on U-shaped rotating frame and is connected with underwater robot propulsion system.The utility model technical innovation is in that sensor arrangement is arranged by reasonable structure design, high-precision dynamic data can be collected to plane vector propulsion system and omni-directional vector propulsion system underwater, to provide verification for underwater unmanned vehicle thrust control technology.
Owner:WUHAN XINDINGTAI TECH CO LTD

A protective cover for an oral scanner

ActiveCN224269275Uavoid inaccurate measurementsReduce refraction errorsEndoscopesSomatoscopeImaging qualityProtection KIT
This utility model discloses a protective cover for an oral scanner, including a main body. A rectangular through-hole is formed on the front surface of the main body near the upper end. A semi-circular groove is formed on the side of the main body. A circular through-hole is formed inside the rectangular through-hole. A lens adjustment mechanism is movably installed inside the rectangular through-hole. A slot is formed on the front surface of the main body near the lower end of the rectangular through-hole. This protective cover for an oral scanner, through the lens adjustment mechanism, allows the operator to adjust the tilt angle of the protective lens as needed and clamp it in place. This effectively reduces refraction errors, improves image quality, ensures accurate measurement by the oral scanner, and reduces the influence of the protective lens on the final scanning image result. The protective clip can be fitted and clamped onto the upper end of the oral scanner protective cover, making assembly and disassembly simple. It also seals the rectangular through-hole, preventing dust and foreign objects from adhering to the surface of the protective lens before use.
Owner:GUANGZHOU VOCATIONAL & TECH COLLEGE OF HEALTH

A multi-range flow measuring device

ActiveCN224413575USolve the shortcomings of single strengthLarge measuring rangeMeasurement deviceControl theory
This utility model relates to a multi-range flow measurement device, including a main cavity, a rotating shaft, a damping adjustment module, a sealing assembly, a swing rod assembly, a swing arm assembly, a baffle, a base, and an angle sensor. The rotating shaft is disposed within and extends through the main cavity. One end of the rotating shaft is connected to the damping adjustment module, and the other end is connected to the angle sensor. One end of the swing rod assembly is sleeved on the rotating shaft and securely connected, while the other end of the swing rod assembly is connected to the swing arm assembly, which has a baffle. The main cavity is installed at the flow measurement position via the base. During measurement, the baffle is in direct contact with the fluid. One end of the sealing assembly is connected to the main cavity, and the other end is connected to the swing rod assembly or the swing arm assembly, isolating and sealing the baffle and the fluid outside the main cavity. This utility model enables flexible adjustment and wide-range measurement. The damping adjustment module can adjust the damping force according to actual working conditions, avoiding the measurement inaccuracy caused by the baffle reaching its maximum range at high flow rates.
Owner:SHANGHAI SHENKAI GASOLINEEUM TECH +3

Wafer stack compensation method, device, medium, electronic equipment and program product

This disclosure relates to the field of semiconductor integrated manufacturing technology, providing a wafer overlay compensation method, apparatus, dielectric, electronic device, and program product, including: determining a first exposure unit within a wafer area and a second exposure unit at the wafer edge; determining a plurality of first measurement points within the first exposure unit according to preset rules; determining a plurality of initial measurement points within the wafer area and the second exposure unit according to preset rules; determining an edge measurement point closest to the wafer edge from the plurality of initial measurement points; determining a plurality of second measurement points within the second exposure unit based on the edge measurement point; and performing overlay compensation on the wafer based on the measurement data of the plurality of first measurement points in the first exposure unit and the plurality of second measurement points in the second exposure unit. This significantly improves the overlay compensation effect of incomplete exposure units, thereby improving the overall wafer yield and solving the problem of poor compensation effect of incomplete exposure units.
Owner:CHENGDU ZIGUANG SEMICON TECH CO LTD

A measuring device for tensile test of mechanical properties of castings

ActiveCN224471409UMeasurement stabilityAccurate precision
The utility model discloses a kind of measuring devices for casting mechanical property tensile test, including base, first support, second support and scale, first baffle is vertically provided in the left end of base, first support is provided on the base right side of first baffle, second support is slidably connected with in the right side of first support, third baffle is slidably connected with in the right side of second support, and top bolt is provided on third baffle, scale is provided in the right side of the top of first baffle, second displacement sleeve is slidably connected on scale, measuring rod is provided in the front end of second displacement sleeve. The utility model can effectively solve the problems existing in the conventional test bar elongation test method, such as inaccurate gauge length measurement, unstable test bar placement, etc., significantly improve the accuracy of test bar gauge length measurement and elongation calculation, while reducing the influence of human factors on measurement results, improve the test efficiency, reduce the labor cost and operation time.
Owner:HUI XIAN CITY TENGFEI MASCH MFG CO LTD

A liquid dispensing device and cleaning equipment

This utility model discloses a liquid dispensing device and a cleaning equipment, belonging to the technical field of cleaning equipment. The liquid dispensing device includes a liquid bottle; a cover plate, with the liquid bottle inverted on the cover plate; a storage tank connected to the cover plate, the storage tank having a second chamber; a first sealing element fitted around the outer periphery of the cover plate, abutting against the liquid bottle; a second sealing element fitted around the outer periphery of the cover plate, abutting against the storage tank; the first and second sealing elements form a closed chamber with the liquid bottle, cover plate, and storage tank; a detection element connected to the second chamber via a connecting assembly, the detection element obtaining the liquid level in the liquid bottle by monitoring the gas pressure in the second chamber, the connecting assembly including a diaphragm that prevents liquid from entering the detection element. This device can prevent liquid from overflowing from the liquid bottle due to increased external temperature, thus avoiding dirt accumulation on the dispensing device platform. Simultaneously, it can monitor the liquid level in the bottle in real time, enabling accurate dispensing and ensuring the cleaning effect of the cleaning equipment.
Owner:WUXI XIAOJING SHARING NETWORK TECH CO LTD